Magnetic memory device and method for manufacturing the same

ABSTRACT

According to one embodiment, a magnetic memory device includes a metal-containing layer, a first magnetic layer, a second magnetic layer, a first intermediate layer, a third magnetic layer, a fourth magnetic layer, a second intermediate layer, and a controller. The metal-containing layer includes first, second, third, fourth, and fifth portions. The first magnetic layer is separated from the third portion. The second magnetic layer is provided between the first magnetic layer and a portion of the third portion. The first intermediate layer includes a portion provided between the first and second magnetic layers. The third magnetic layer is separated from the fourth portion. The fourth magnetic layer is provided between the third magnetic layer and a portion of the fourth portion. The second intermediate layer includes a portion provided between the third and fourth magnetic layers. The controller is electrically connected with the first portion and the second portion.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority fromJapanese Patent Application No. 2016-154039, filed on Aug. 4, 2016; theentire contents of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a magnetic memorydevice and a method for manufacturing the same.

BACKGROUND

It is desirable to increase the bit density of a magnetic memory device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A to FIG. 1D are schematic views illustrating a magnetic memorydevice according to a first embodiment;

FIG. 2A and FIG. 2B are schematic cross-sectional views illustratingoperations of the magnetic memory device;

FIG. 3A and FIG. 3B are schematic views illustrating the magnetic memorydevice according to the first embodiment;

FIG. 4A to FIG. 4C are schematic cross-sectional views illustratingother magnetic memory devices according to the first embodiment;

FIG. 5A to FIG. 5H are schematic cross-sectional views illustratingother magnetic memory devices according to the first embodiment;

FIG. 6A to FIG. 6D are schematic views illustrating a magnetic memorydevice according to a second embodiment;

FIG. 7 is a schematic plan view illustrating the magnetic memory deviceaccording to the second embodiment;

FIG. 8A and FIG. 8B are schematic cross-sectional views illustrating amagnetic memory device according to the second embodiment;

FIG. 9A to FIG. 9C are schematic cross-sectional views illustratingother magnetic memory devices according to the second embodiment;

FIG. 10A to FIG. 10D are schematic plan views illustrating othermagnetic memory devices according to the second embodiment;

FIG. 11 is a flowchart illustrating a method for manufacturing amagnetic memory device according to a third embodiment;

FIG. 12A to FIG. 12D are schematic views illustrating the method formanufacturing the magnetic memory device according to the thirdembodiment;

FIG. 13A to FIG. 13E are schematic views illustrating the method formanufacturing the magnetic memory device according to the thirdembodiment;

FIG. 14A to FIG. 14C are schematic views illustrating the method formanufacturing the magnetic memory device according to the thirdembodiment;

FIG. 15A and FIG. 15B are schematic views illustrating the method formanufacturing the magnetic memory device according to the thirdembodiment;

FIG. 16 is a schematic cross-sectional view illustrating a magneticmemory device according to a fourth embodiment;

FIG. 17 is a schematic view illustrating another magnetic memory deviceaccording to the fourth embodiment;

FIG. 18 is a schematic view illustrating a magnetic memory deviceaccording to a fifth embodiment;

FIG. 19A and FIG. 19B are schematic cross-sectional views illustrating amethod for manufacturing the magnetic memory device according to thefifth embodiment; and

FIG. 20 is a schematic view illustrating another magnetic memory deviceaccording to the fifth embodiment.

DETAILED DESCRIPTION

According to one embodiment, a magnetic memory device includes ametal-containing layer, a first magnetic layer, a second magnetic layer,a first intermediate layer, a third magnetic layer, a fourth magneticlayer, a second intermediate layer, and a controller. Themetal-containing layer includes a first portion, a second portion, athird portion located between the first portion and the second portion,a fourth portion located between the third portion and the secondportion, and a fifth portion located between the third portion and thefourth portion. The first magnetic layer is separated from the thirdportion in a first direction crossing a second direction. The seconddirection is from the first portion toward the second portion. Thesecond magnetic layer is provided between the first magnetic layer and aportion of the third portion. The first intermediate layer includes aportion provided between the first magnetic layer and the secondmagnetic layer. The first intermediate layer is nonmagnetic. The thirdmagnetic layer is separated from the fourth portion in the firstdirection. The fourth magnetic layer is provided between the thirdmagnetic layer and a portion of the fourth portion. The secondintermediate layer includes a portion provided between the thirdmagnetic layer and the fourth magnetic layer. The second intermediatelayer is nonmagnetic. The controller is electrically connected with thefirst portion and the second portion. A length along a third directionof the third portion is longer than a length along the third directionof the second magnetic layer. The third direction crosses a planeincluding the first direction and the second direction. The length alongthe third direction of the third portion is longer than a length alongthe third direction of the fifth portion. The controller is configuredto implement a first program operation of supplying a first programcurrent from the first portion toward the second portion, and a secondprogram operation of supplying a second program current from the secondportion toward the first portion. A first electrical resistance betweenthe first magnetic layer and the first portion after the first programoperation is different from a second electrical resistance between thefirst magnetic layer and the first portion after the second programoperation.

According to another embodiment, a magnetic memory device includes ametal-containing layer, a first magnetic layer, a second magnetic layer,a first intermediate layer, and a controller. The metal-containing layerincludes a first portion, a second portion, and a third portion locatedbetween the first portion and the second portion. The first magneticlayer is separated from the third portion in a first direction crossinga second direction. The second direction is from the first portiontoward the second portion. The second magnetic layer is provided betweenthe first magnetic layer and a portion of the third portion. The firstintermediate layer includes a portion provided between the firstmagnetic layer and the second magnetic layer. The first intermediatelayer is nonmagnetic. The controller is electrically connected with thefirst portion and the second portion. A length along a third directionof the third portion is longer than a length along the third directionof the second magnetic layer. The third direction crosses a planeincluding the first direction and the second direction. The length alongthe third direction of the third portion is longer than a length alongthe third direction of a portion between the third portion and thesecond portion. The controller is configured to implement a firstprogram operation of supplying a first program current from the firstportion toward the second portion, and a second program operation ofsupplying a second program current from the second portion toward thefirst portion. A first electrical resistance between the first magneticlayer and one of the first portion or the second portion after the firstprogram operation is different from a second electrical resistancebetween the first magnetic layer and the one of the first portion or thesecond portion after the second program operation.

According to another embodiment, a magnetic memory device includes ametal-containing layer, a first magnetic layer, a second magnetic layer,a first intermediate layer, and a controller. The metal-containing layerincludes a first portion, a second portion, and a third portion locatedbetween the first portion and the second portion. The first magneticlayer is separated from the third portion in a first direction crossinga second direction. The second direction is from the first portiontoward the second portion. The second magnetic layer is provided betweenthe first magnetic layer and a portion of the third portion. The firstintermediate layer includes a portion provided between the firstmagnetic layer and the second magnetic layer. The first intermediatelayer is nonmagnetic. The controller is electrically connected with thefirst portion and the second portion. The third portion includes a firstoverlap region overlapping the second magnetic layer in the firstdirection, and a first non-overlap region not overlapping the secondmagnetic layer in the first direction. A thickness along the firstdirection of at least a portion of the first non-overlap region isthinner than a first overlap region thickness along the first directionof the first overlap region. The controller is configured to implement afirst program operation of supplying a first program current from thefirst portion toward the second portion, and a second program operationof supplying a second program current from the second portion toward thefirst portion. A first electrical resistance between the first magneticlayer and the first portion after the first program operation isdifferent from a second electrical resistance between the first magneticlayer and the first portion after the second program operation.

According to another embodiment, a magnetic memory device includes afirst metal-containing layer, a second metal-containing layer, aplurality of first stacked bodies, a plurality of second stacked bodies,a third stacked body, and a controller. The first metal-containing layerincludes a first portion, a second portion, and a first interveningportion provided between the first portion and the second portion. Thesecond metal-containing layer includes a third portion, a fourthportion, and a second intervening portion provided between the thirdportion and the fourth portion. The second portion is provided betweenthe first portion and the fourth portion. The third portion is providedbetween the second portion and the fourth portion. The plurality offirst stacked bodies are arranged along the first metal-containinglayer. One of the first stacked bodies includes a first magnetic layer,a second magnetic layer, and a first intermediate layer. The firstmagnetic layer is separated from the first intervening portion in afirst direction crossing a second direction. The second direction isfrom the first portion toward the second portion. The second magneticlayer is provided between the first intervening portion and the firstmagnetic layer. The first intermediate layer is nonmagnetic and includesa portion provided between the first magnetic layer and the secondmagnetic layer. The plurality of second stacked bodies are arrangedalong the second metal-containing layer. One of the second stackedbodies includes a third magnetic layer, a fourth magnetic layer, and asecond intermediate layer. The third magnetic layer is separated fromthe second intervening portion in the first direction. The fourthmagnetic layer is provided between the second intervening portion andthe third magnetic layer. The second intermediate layer is nonmagneticand includes a portion provided between the third magnetic layer and thefourth magnetic layer. The third stacked body includes a fifth magneticlayer and is provided between the plurality of first stacked bodies andthe plurality of second stacked bodies. The controller is electricallyconnected with the first to fourth portions, the plurality of firststacked bodies, and the plurality of second stacked bodies. Thecontroller is configured to implement a first program operation ofsupplying, to the first metal-containing layer, a first program currentfrom the first portion toward the second portion, and a second programoperation of supplying, to the first metal-containing layer, a secondprogram current from the second portion toward the first portion. Afirst electrical resistance between the first magnetic layer and one ofthe first portion or the second portion after the first programoperation is different from a second electrical resistance between thefirst magnetic layer and the one of the first portion or the secondportion after the second program operation. The controller is configuredto implement a third program operation of supplying, to the secondmetal-containing layer, a third program current from the third portiontoward the fourth portion, and a fourth program operation of supplying,to the second metal-containing layer, a fourth program current from thefourth portion toward the third portion. A third electrical resistancebetween the third magnetic layer and one of the third portion or thefourth portion after the third program operation is different from afourth electrical resistance between the third magnetic layer and theone of the third portion or the fourth portion after the second programoperation.

According to another embodiment, a method for manufacturing a magneticmemory device is disclosed. The method can include forming a stackedfilm on a metal-containing film provided on a base member. The stackedfilm includes a first magnetic film, a second magnetic film providedbetween the first magnetic film and the metal-containing film, and anintermediate film provided between the first magnetic film and thesecond magnetic film. The intermediate film is nonmagnetic. The methodcan include forming a plurality of first trenches reaching themetal-containing film. The plurality of first trenches extend along athird direction and are arranged in a second direction. The seconddirection crosses a first direction. The first direction isperpendicular to a surface of the metal-containing film. The thirddirection crosses a plane including the first direction and the seconddirection. The method can include forming a first insulating portioninside the first trenches. The method can include forming a plurality ofsecond trenches extending in the second direction by removing a portionof the stacked film and a portion of the first insulating portion afterthe forming of the first insulating portion. One of the plurality ofsecond trenches include a first trench region and a second trenchregion. The first trench region overlaps the stacked film in the thirddirection. The second trench region overlaps the first insulatingportion in the third direction. A width along the third direction of thefirst trench region is narrower than a width along the third directionof the second trench region. In addition, the method can includeremoving the metal-containing film exposed in the plurality of secondtrenches, and forming a second insulating portion inside the pluralityof second trenches.

Various embodiments will be described hereinafter with reference to theaccompanying drawings.

The drawings are schematic and conceptual; and the relationships betweenthe thickness and width of portions, the proportions of sizes amongportions, etc., are not necessarily the same as the actual valuesthereof. Further, the dimensions and proportions may be illustrateddifferently among drawings, even for identical portions.

In the specification and drawings, components similar to those describedor illustrated in a drawing thereinabove are marked with like referencenumerals, and a detailed description is omitted as appropriate.

First Embodiment

FIG. 1A to FIG. 1D are schematic views illustrating a magnetic memorydevice according to a first embodiment.

FIG. 1A is a perspective view. FIG. 1B is a line A1-A2 cross-sectionalview of FIG. 1A. FIG. 1C is a line B1-B2 cross-sectional view of FIG.1A. FIG. 1D is a line C1-C2 cross-sectional view of FIG. 1A.

As shown in FIG. 1A to FIG. 1D, the magnetic memory device 110 accordingto the embodiment includes a metal-containing layer 21, a first magneticlayer 11, a second magnetic layer 12, a first intermediate layer 11 i,and a controller 70. In the example, a base member 20 s, a thirdmagnetic layer 13, a fourth magnetic layer 14, and a second intermediatelayer 12 i are further provided.

The first magnetic layer 11, the second magnetic layer 12, and the firstintermediate layer 11 i are included in a first stacked body SB1. Thethird magnetic layer 13, the fourth magnetic layer 14, and the secondintermediate layer 12 i are included in a second stacked body SB2. Eachof these stacked bodies corresponds to one memory portion (memory cell).Thus, multiple stacked bodies are provided in the magnetic memory device110. The number of stacked bodies is arbitrary.

The metal-containing layer 21 is provided on the base member 20 s. Thestacked bodies recited above are provided on the metal-containing layer21. The base member 20 s may be at least a portion of a substrate. Thebase member 20 s is, for example, insulative. The base member 20 s mayinclude, for example, a substrate including at least one of siliconoxide, aluminum oxide, or the like. The silicon oxide is, for example,thermally-oxidized silicon.

The metal-containing layer 21 includes, for example, tantalum (Ta), etc.Examples of the material of the metal-containing layer 21 are describedbelow.

The metal-containing layer 21 includes first to fifth portions 21 a to21 e. The third portion 21 c is positioned between the first portion 21a and the second portion 21 b. The fourth portion 21 d is positionedbetween the third portion 21 c and the second portion 21 b. The fifthportion 21 e is positioned between the third portion 21 c and the fourthportion 21 d.

The first stacked body SB1 is provided on the third portion 21 c. Thesecond stacked body SB2 is provided on the fourth portion 21 d. Astacked body is not provided on the fifth portion 21 e. Insulatingportions that are described below are provided on the fifth portion 21e.

The first magnetic layer 11 is separated from the third portion 21 calong a first direction.

The first direction is taken as a Z-axis direction. One axisperpendicular to the Z-axis direction is taken as an X-axis direction. Adirection perpendicular to the Z-axis direction and the X-axis directionis taken as a Y-axis direction.

In the metal-containing layer 21, the direction from the first portion21 a toward the second portion 21 b is taken as a second direction. Thesecond direction is, for example, the X-axis direction. The firstdirection crosses the second direction. The metal-containing layer 21extends along the X-axis direction.

The second magnetic layer 12 is provided between the first magneticlayer 11 and a portion of the third portion 21 c.

The first intermediate layer 11 i includes a portion provided betweenthe first magnetic layer 11 and the second magnetic layer 12. The firstintermediate layer 11 i is nonmagnetic.

In the second stacked body SB2, the third magnetic layer 13 is separatedfrom the fourth portion 21 d in the first direction (the Z-axisdirection). The fourth magnetic layer 14 is provided between the thirdmagnetic layer 13 and a portion of the fourth portion 21 d. The secondintermediate layer 12 i includes a portion provided between the thirdmagnetic layer 13 and the fourth magnetic layer 14. The secondintermediate layer 12 i is nonmagnetic.

The first magnetic layer 11 and the third magnetic layer are, forexample, fixed magnetic layers. The second magnetic layer 12 and thefourth magnetic layer 14 are, for example, free magnetic layers. A firstmagnetization 11M of the first magnetic layer 11 does not change easilycompared to a second magnetization 12M of the second magnetic layer 12.A third magnetization 13M of the third magnetic layer 13 does not changeeasily compared to a fourth magnetization 14M of the fourth magneticlayer 14. For example, the first intermediate layer 11 i and the secondintermediate layer 12 i function as tunneling layers.

For example, the stacked bodies (the first stacked body SB1, the secondstacked body SB2, etc.) function as magnetic variable resistanceelements. For example, a TMR (Tunnel Magneto Resistance Effect) occursin the stacked bodies. For example, the electrical resistance of thepath including the first magnetic layer 11, the first intermediate layer11 i, and the second magnetic layer 12 changes according to thedifference between the orientation of the first magnetization 11M andthe orientation of the second magnetization 12M. For example, theelectrical resistance of the path including the third magnetic layer 13,the second intermediate layer 12 i, and the fourth magnetic layer 14changes according to the difference between the orientation of the thirdmagnetization 13M and the orientation of the fourth magnetization 14M.For example, the stacked body has a magnetic tunnel junction (MTJ).

In the example, the first magnetization 11M and the third magnetization13M are aligned with the Y-axis direction. The second magnetization 12Mand the fourth magnetization 14M are aligned with the Y-axis direction.For example, the first magnetic layer 11 and the third magnetic layer 13function as reference layers. For example, the second magnetic layer 12and the fourth magnetic layer 14 function as memory layers.

For example, the second magnetic layer 12 and the fourth magnetic layer14 function as layers that store information. For example, a first statein which the second magnetization 12M is oriented in one directioncorresponds to first information that is stored. A second state in whichthe second magnetization 12M is oriented in another directioncorresponds to second information that is stored. The first informationcorresponds to, for example, one of “0” or “1.” The second informationcorresponds to the other of “0” or “1.” Similarly, the orientation ofthe fourth magnetization 14M corresponds to such information.

For example, the second magnetization 12M and the fourth magnetization14M can be controlled by a current (a program current) flowing in themetal-containing layer 21. For example, the orientations of the secondmagnetization 12M and the fourth magnetization 14M can be controlled bythe orientation of the current (the program current) of themetal-containing layer 21. For example, the metal-containing layer 21functions as, for example, a spin orbit layer (SOL). For example, theorientation of the second magnetization 12M can be changed by thespin-orbit torque generated between the metal-containing layer 21 andthe second magnetic layer 12. For example, the orientation of the fourthmagnetization 14M can be changed by the spin-orbit torque generatedbetween the metal-containing layer 21 and the fourth magnetic layer 14.The spin-orbit torque is based on the current (the program current)flowing in the metal-containing layer 21.

The current (the program current) is supplied by the controller 70. Forexample, the controller includes a drive circuit 75.

The controller 70 is electrically connected with the first portion 21 a,the second portion 21 b, and the first magnetic layer 11. In theexample, the controller 70 is further electrically connected with thethird magnetic layer 13. In the example, a first switch element Sw1(e.g., a transistor) is provided in the current path between the drivecircuit 75 and the first magnetic layer 11. A second switch element Sw2(e.g., a transistor) is provided in the current path between the drivecircuit 75 and the third magnetic layer 13. These switch elements areincluded in the controller 70.

In a first program operation, the controller 70 supplies a first programcurrent Iw1 to the metal-containing layer 21. Thereby, the first stateis formed. The first program current Iw1 is a current from the firstportion 21 a toward the second portion 21 b. In a second programoperation, the controller 70 supplies a second program current Iw2 tothe metal-containing layer 21. Thereby, the second state is formed. Thesecond program current Iw2 is a current from the second portion 21 btoward the first portion 21 a.

A first electrical resistance between the first magnetic layer 11 andthe first portion 21 a after the first program operation (the firststate) is different from a second electrical resistance between thefirst magnetic layer 11 and the first portion 21 a after the secondprogram operation (the second state).

For example, the difference between these electrical resistances isbased on the difference between the states of the second magnetization12M between the first state and the second state.

Similarly, the controller 70 implements a third program operation ofsupplying the first program current Iw1 to the metal-containing layer21. Thereby, a third state is formed. The controller 70 implements afourth program operation of supplying the second program current Iw2 tothe metal-containing layer 21. Thereby, a fourth state is formed. Athird electrical resistance between the third magnetic layer 13 and thefirst portion 21 a after the third program operation (the third state)is different from a fourth electrical resistance between the thirdmagnetic layer 13 and the first portion 21 a after the fourth programoperation (the fourth state).

For example, the difference between these electrical resistances isbased on the difference between the states of the fourth magnetization14M between the third state and the fourth state.

In a read operation, the controller 70 may sense a characteristic (whichmay be a voltage, a current, or the like) corresponding to theelectrical resistance between the first magnetic layer 11 and the firstportion 21 a. In the read operation, the controller 70 may sense acharacteristic (which may be a voltage, a current, or the like)corresponding to the electrical resistance between the third magneticlayer 13 and the first portion 21 a.

One of the first stacked body SB1 (a first memory cell) or the secondstacked body SB2 (a second memory cell) is selected by operations of thefirst switch element Sw1 and the second switch element Sw2 recitedabove. The program operation and the read operation of the desiredmemory cell is performed.

As described above, the controller 70 is electrically connected with thefirst stacked body SB1 (the first magnetic layer 11) and the secondstacked body SB2 (the third magnetic layer 13). When programminginformation to the first stacked body SB1, a prescribed select voltageis applied to the first magnetic layer 11. At this time, an unselectvoltage is applied to the second stacked body SB2. On the other hand,when programming information to the second stacked body SB2, theprescribed select voltage is applied to the third magnetic layer 13. Atthis time, the unselect voltage is applied to the first stacked bodySB1. The application of a voltage of 0 volts also is included in the“application of a voltage.” The potential of the select voltage isdifferent from the potential of the unselect voltage.

For example, in the first program operation, the controller 70 sets thefirst magnetic layer 11 to a potential (e.g., the select potential) thatis different from the potential (e.g., the unselect potential) of thethird magnetic layer 13. In the second program operation, the controller70 sets the first magnetic layer 11 to a potential (e.g., the selectpotential) that is different from the potential (e.g., the unselectpotential) of the third magnetic layer 13.

For example, in the third program operation, the controller 70 sets thethird magnetic layer 13 to a potential (e.g., the select potential) thatis different from the potential (e.g., the unselect potential) of thefirst magnetic layer 11. In the fourth program operation, the controller70 sets the third magnetic layer 13 to a potential (e.g., the selectpotential) that is different from the potential (e.g., the unselectpotential) of the first magnetic layer 11.

For example, such a selection of the potentials is performed by theoperations of the first switch element Sw1 and the second switch elementSw2.

The multiple stacked bodies correspond respectively to multiple memorycells. It is possible to store mutually-different information in themultiple memory cells. When storing the information in the multiplememory cells, for example, after storing one of “1” or “0” in themultiple memory cells, the other of “1” or “0” may be stored in severalmemory cells of the multiple memory cells as desired. For example, afterone of “1” or “0” is stored in one of the multiple memory cells, one of“1” or “0” may be stored in one other of the multiple memory cells.

In the description recited above, the first portion 21 a and the secondportion 21 b are interchangeable with each other. For example, theelectrical resistance recited above may be the electrical resistancebetween the first magnetic layer 11 and the second portion 21 b. Theelectrical resistance recited above may be the electrical resistancebetween the third magnetic layer 13 and the second portion 21 b.

In the embodiment, a portion of the metal-containing layer 21 protrudesin the Y-axis direction using the position of the stacked body as areference. The thickness of the protruding portion is locally thin. Thisconfiguration is described below.

As shown in FIG. 1C, the third portion 21 c includes a first overlapregion 21 cc, a first non-overlap region 21 ca, and a second non-overlapregion 21 cb. The first overlap region 21 cc overlaps the secondmagnetic layer 12 in the first direction (the Z-axis direction). Thefirst non-overlap region 21 ca does not overlap the second magneticlayer 12 in the first direction. The second non-overlap region 21 cbdoes not overlap the second magnetic layer 12 in the first direction.The direction from the first non-overlap region 21 ca toward the secondnon-overlap region 21 cb is aligned with a third direction. The thirddirection crosses the first direction and the second direction. Forexample, the third direction crosses a plane including the firstdirection and the second direction. The third direction is, for example,the Y-axis direction. The first overlap region 21 cc is positionedbetween the first non-overlap region 21 ca and the second non-overlapregion 21 cb in the third direction.

The thickness along the first direction (the Z-axis direction) of atleast a portion of the first non-overlap region 21 ca is thinner than afirst overlap region thickness 21 cct along the first direction of thefirst overlap region 21 cc. The thickness along the first direction ofat least a portion of the second non-overlap region 21 cb is thinnerthan the first overlap region thickness 21 cct.

Thus, in the embodiment, protruding portions (the first non-overlapregion 21 ca and the second non-overlap region 21 cb) are provided; andthe thicknesses of the protruding portions are thinner than thethickness (the first overlap region thickness 21 cct) of the otherportion (the first overlap region 21 cc). Thereby, the program currentcan be reduced.

An example of characteristics of the magnetic memory device will now bedescribed.

FIG. 2A and FIG. 2B are schematic cross-sectional views illustratingoperations of the magnetic memory device.

FIG. 2A corresponds to the magnetic memory device 110 according to theembodiment. FIG. 2B corresponds to a magnetic memory device 119according to a first reference example. In the third portion 21 c of themetal-containing layer 21 in the first reference example, the firstoverlap region 21 cc is provided; but the protruding portions (the firstnon-overlap region 21 ca and the second non-overlap region 21 cb) arenot provided.

As shown in FIG. 2B, the paths of the electrons are bent according tothe direction of a spin 21 sp in the metal-containing layer 21 when acurrent flows in the metal-containing layer 21. It is considered thatthe spin 21 sp that is polarized in an orientation antiparallel to thesecond magnetization 12M of the second magnetic layer 12 accumulates inthe upper portion of the metal-containing layer 21. On the other hand,it is considered that the spin 21 sp that is polarized in an orientationin a direction parallel to the second magnetization 12M accumulates inthe lower portion of the metal-containing layer 21. It is consideredthat the spin 21 sp that is polarized in the upward direction or thedownward direction accumulates in the end portion in the Y-axisdirection of the metal-containing layer 21.

In the magnetic memory device 119 of the first reference example, anon-overlap region such as those recited above is not provided in themetal-containing layer 21. In the first reference example, the spintorque is transferred toward the stacked body (the MTJ element) from themetal-containing layer 21 via a region (the end portion in the Y-axisdirection) where the polarized spin is polarized in the verticaldirection (the Z-axis direction). Therefore, the coherency of themagnetization reversal degrades easily.

Conversely, in the magnetic memory device 110 according to theembodiment as shown in FIG. 2A, the first non-overlap region 21 ca andthe second non-overlap region 21 cb are provided in the metal-containinglayer 21 in addition to the first overlap region 21 cc. Also, thethicknesses of these non-overlap regions are thinner than the thicknessof the first overlap region 21 cc. In such a case, the coherency of thespin polarization is maintained easily. The transfer efficiency of thespin torque can be high.

Thereby, the efficiency of the programming increases. Thereby, theprogram current can be reduced.

On the other hand, a second reference example may be considered in whichthe first non-overlap region 21 ca and the second non-overlap region 21cb are provided; and the thicknesses of these non-overlap regions arethe same as the thickness of the first overlap region 21 cc. In thesecond reference example, the first non-overlap region 21 ca and thesecond non-overlap region 21 cb do not contribute to the spin torquetransfer. As a result, the program current increases.

Conversely, in the magnetic memory device 110 according to theembodiment, the thicknesses of the non-overlap regions are thinner thanthe thickness of the first overlap region 21 cc. Thereby, for example, ashunt current that flows in the first non-overlap region 21 ca and thesecond non-overlap region 21 cb and is ineffective for the recordingfunction can be reduced while segregating the polarized electrons thatreduce the coherency of the spin polarization to the edge of themetal-containing layer 21. Thereby, for example, the program current canbe reduced. The coherency of the spin polarization is maintained easily.Because the transfer efficiency of the spin torque can be high, theefficiency of the programming can be increased; and the program currentcan be reduced.

Because the program current can be reduced, for example, the capacity ofthe driver driving the memory unit can be reduced. Thereby, for example,the bit density can be increased because the size of the driver can besmall. The decrease of the program current makes higher energyconservation possible.

For example, the width (the protrusion amount) in the Y-axis directionof the non-overlap region of the metal-containing layer 21 recited aboveis larger than the protrusion amount due to the patterning error, etc.

As shown in FIG. 1C, for example, the metal-containing layer 21 has alength 21 cay along the third direction (the Y-axis direction) of thefirst non-overlap region 21 ca, and a length 21 cby along the thirddirection of the second non-overlap region 21 cb. Here, a first ratio isthe ratio of the total of the length 21 cay and the length 21 cby to thefirst overlap region thickness 21 cct. The first ratio is the ratio ofthe protrusion amount of the metal-containing layer 21 to the thicknessof the metal-containing layer 21. The protrusion amount is large if thefirst ratio is high.

On the other hand, as shown in FIG. 1B, there are cases where the secondmagnetic layer 12 has a tapered configuration. For example, the secondmagnetic layer 12 has a thickness t12 along the first direction (theZ-axis direction). The second magnetic layer 12 has a surface 12L (thelower surface) opposing the metal-containing layer 21, and a surface 12U(the upper surface) opposing the first intermediate layer 11 i. A length12 xL is the length along the second direction (the X-axis direction) ofthe surface 12L. A length 12 xU is the length along the second direction(the X-axis direction) of the surface 12U.

In such a case, the first ratio is higher than the ratio of the absolutevalue of the difference between the length 12 xL and the length 12 xU tothe thickness t12. In other words, the first ratio is higher than theratio recited above caused by the taper provided in the second magneticlayer 12.

Thus, by providing the large protruding portions (the first non-overlapregion 21 ca and the second non-overlap region 21 cb), the coherency ofthe spin polarization is maintained; and the transfer efficiency of thespin torque can be high. The efficiency of the programming can beincreased; and the program current can be reduced. Thereby, the bitdensity can be increased.

If the protrusion amount of the protruding portion is excessively large,the width in the Y-axis direction of the metal-containing layer 21becomes large. In the case where the multiple metal-containing layers 21are provided, the pitch of the multiple metal-containing layers 21becomes large; and the increase of the bit density is insufficient.

In the embodiment, for example, it is favorable for the length 21 cayalong the third direction (the Y-axis direction) of the firstnon-overlap region 21 ca and the length 21 cby along the third directionof the second non-overlap region 21 cb each to be less than 0.25 timesthe width (a length 21 yL described below) along the third direction ofthe second magnetic layer 12. Thereby, a high bit density can bemaintained.

In the embodiment, the protrusion amount (e.g., the length 21 cay or thelength 21 cby) of the protruding portion provided in themetal-containing layer 21 is, for example, not less than 0.5 times andnot more than 10 times the spin diffusion length of the metal-containinglayer 21.

As shown in FIG. 1C, a length 12 yL is the length along the thirddirection (the Y-axis direction) of the surface 12L of the secondmagnetic layer 12 opposing the metal-containing layer 21. A length 12 yUis the length along the third direction (the Y-axis direction) of thesurface 12U of the second magnetic layer 12 opposing the firstintermediate layer 11 i. In the embodiment, the first ratio recitedabove is higher than the ratio of the absolute value of the differencebetween the length 12 yL and the length 12 yU to the thickness t12 alongthe first direction of the second magnetic layer 12.

As recited below, the second stacked body SB2 also has a configurationsimilar to that of the first stacked body SB1.

As shown in FIG. 1D, the fourth portion 21 d includes a second overlapregion 21 dc, a third non-overlap region 21 da, and a fourth non-overlapregion 21 db. The second overlap region 21 dc overlaps the fourthmagnetic layer 14 in the first direction (the Z-axis direction). Thethird non-overlap region 21 da does not overlap the fourth magneticlayer 14 in the first direction. The fourth non-overlap region 21 dbdoes not overlap the fourth magnetic layer 14 in the first direction.The direction from the third non-overlap region 21 da toward the fourthnon-overlap region 21 db is aligned with the third direction (the Y-axisdirection). The second overlap region 21 dc is positioned between thethird non-overlap region 21 da and the fourth non-overlap region 21 dbin the third direction.

The thickness along the first direction (the Z-axis direction) of atleast a portion of the third non-overlap region 21 da is thinner than asecond overlap region thickness 21 dct along the first direction of thesecond overlap region 21 dc. The thickness along the first direction ofat least a portion of the fourth non-overlap region 21 db is thinnerthan the second overlap region thickness 21 dct.

As shown in FIG. 1D, the metal-containing layer 21 has a length 21 dayalong the third direction (the Y-axis direction) of the thirdnon-overlap region 21 da, and a length 21 dby along the third directionof the fourth non-overlap region 21 db. In such a case, a second ratiois the ratio of the total of the length 21 day and the length 21 dby tothe second overlap region thickness 21 dct.

On the other hand, as shown in FIG. 1B, the fourth magnetic layer 14 hasa thickness t14 along the first direction (the Z-axis direction). Thefourth magnetic layer 14 has a surface 14L (the lower surface) opposingthe metal-containing layer 21, and a surface 14U (the upper surface)opposing the second intermediate layer 12 i. A length 14 xL is thelength along the second direction (the X-axis direction) of the surface14L. A length 14 xU is the length along the second direction (the X-axisdirection) of the surface 14U.

In such a case, the second ratio is higher than the ratio of theabsolute value of the difference between the length 14 xL and the length14 xU to the thickness t14. In other words, the second ratio is higherthan the ratio caused by the taper provided in the fourth magnetic layer14.

As shown in FIG. 1D, a length 14 yL is the length along the thirddirection (the Y-axis direction) of the surface 14L of the fourthmagnetic layer 14 opposing the metal-containing layer 21. A length 14 yUis the length along the third direction (the Y-axis direction) of thesurface 14U of the fourth magnetic layer 14 opposing the secondintermediate layer 12 i. In the embodiment, the second ratio recitedabove is higher than the ratio of the absolute value of the differencebetween the length 14 yL and the length 14 yU to the thickness t14 alongthe first direction of the fourth magnetic layer 14.

For example, information relating to the lengths, the thicknesses, thewidths, etc., recited above are obtained using a transmission electronmicroscope, etc.

FIG. 3A and FIG. 3B are schematic views illustrating the magnetic memorydevice according to the first embodiment.

FIG. 3A is a perspective view. FIG. 3B is a plan view.

As shown in FIG. 3B, for example, multiple electrodes 22X and multiplemetal-containing layers 21X are provided in the magnetic memory device110. For example, the multiple electrodes 22X extend in the Y-axisdirection. The multiple electrodes 22X are arranged in the X-axisdirection. One of the multiple electrodes 22X is an electrode 22. Oneother of the multiple electrodes 22X is an electrode 22A. For example,the multiple metal-containing layers 21X extend in the X-axis direction.The multiple metal-containing layers 21X are arranged in the Y-axisdirection. One of the multiple metal-containing layers 21X is ametal-containing layer 21. One other of the multiple metal-containinglayers 21X is a metal-containing layer 21A.

For example, stacked bodies SB0 are provided between the multipleelectrodes 22X and the multiple metal-containing layers 21X.

As shown in FIG. 3A, for example, the first stacked body SB1 is providedbetween the metal-containing layer 21 and the electrode 22. The secondstacked body SB2 is provided between the metal-containing layer 21 andthe electrode 22A.

As shown in FIG. 3B, for example, the pitch of the multiple electrodes22X is “2F.” The pitch of the multiple metal-containing layers 21X is,for example, “3F.” For example, “F” is the minimum patterning dimension.

As shown in FIG. 3B, the controller 70 includes first to third circuits71 to 73. The first circuit 71 is electrically connected with the firstportion 21 a of the metal-containing layer 21. The second circuit 72 iselectrically connected with the second portion 21 b of themetal-containing layer 21. The third circuit 73 is electricallyconnected with the stacked body SB1 (the first magnetic layer 11) viathe electrode 22. The first circuit 71 is electrically connected with anend of each of the multiple metal-containing layers 21X. The secondcircuit 72 is electrically connected with another end of each of themultiple metal-containing layers 21X. The third circuit 73 iselectrically connected with each of the multiple electrodes 22X. In FIG.3B, the switch elements (referring to FIG. 1A) are not illustrated.

FIG. 4A to FIG. 4C are schematic cross-sectional views illustratingother magnetic memory devices according to the first embodiment.

As shown in FIG. 4A, the metal-containing layer 21, the first stackedbody SB1, and the second stacked body SB2 are provided in anothermagnetic memory device 110A according to the embodiment as well. In theexample, the thickness of the metal-containing layer 21 is locally thinin a region between the two stacked bodies. An insulating portion 40 isprovided around the multiple stacked bodies. Otherwise, the magneticmemory device 110A is similar to the magnetic memory device 110.

In the magnetic memory device 110A, a thickness 21 et along the firstdirection (the Z-axis direction) of the fifth portion 21 e of themetal-containing layer 21 is thinner than the first overlap regionthickness 21 cct. The thickness 21 et is thinner than the second overlapregion thickness 21 dct. By providing such a difference between thethicknesses, for example, the spin coherence improves. For example, thespin coherence particularly improves more in the case of a structure inwhich the width (the length along the Y-axis direction) of themetal-containing layer 21 is wider than the width (the length along theY-axis direction) of the stacked bodies SB0.

For example, because the thickness 21 et of the fifth portion 21 e ofthe metal-containing layer 21 is thin, the consumed energy per unitdistance traveled becomes high when the electrons pass through the fifthportion 21 e. The travel direction of the electrons is aligned with theX-axis direction; and, for example, the dispersion (the fluctuation) ofthe direction of the flow of the electrons flowing into the thirdportion 21 c or the fourth portion 21 d from the fifth portion 21 ebecomes small. As a result, the dispersion (the fluctuation) of thedirection of the electrons flowing into the stacked bodies SB0 issuppressed. The spin coherence improves.

For example, after forming the stacked bodies recited above on themetal-containing film used to form the metal-containing layers 21, thesurface of the metal-containing film not covered with the stacked bodiesis processed (e.g., plasma processing). The processing is, for example,oxidation treatment or nitridation treatment. Thereby, the processedsurface portion of the metal-containing film is oxidized or nitrided.The remaining portions become the metal-containing layers 21. Forexample, the difference between the thicknesses recited above can beformed by such processing.

The insulating portion 40 includes, for example, at least a portionselected from the group consisting of silicon oxide, silicon nitride,and silicon oxynitride. The insulating portion 40 may include a portionof a compound formed by the oxidizing or the nitriding recited above.

A compound layer 41 is provided in the example. The compound layer 41includes a compound including a metal included in the second magneticlayer 12 (or the fourth magnetic layer 14). The compound layer 41 mayfurther include a compound including a metal included in the firstmagnetic layer 11 (or the third magnetic layer 13). The second magneticlayer 12 has a side surface 12 s. For example, the side surface 12 scrosses the second direction (the X-axis direction). The compound layer41 opposes the side surface 12 s. The fourth magnetic layer 14 has aside surface 14 s. For example, the side surface 14 s crosses the seconddirection (the X-axis direction). The compound layer 41 opposes the sidesurface 14 s. For example, leakage current at the side surfaces of thestacked bodies can be suppressed by the compound layer 41.

As shown in FIG. 4B, a first compound region 42 a (a compound layer) isprovided in another magnetic memory device 110B according to theembodiment. The first compound region 42 a includes a compound includinga metal included in the second magnetic layer 12 (or the fourth magneticlayer 14). The first compound region 42 a opposes the side surface 12 sof the second magnetic layer 12 and the side surface 14 s of the fourthmagnetic layer 14. The first compound region 42 a is aligned with thedirection (the X-axis direction) connecting the second magnetic layer 12and the fourth magnetic layer 14 between the second magnetic layer 12and the fourth magnetic layer 14. For example, the first compound region42 a is provided to be continuous between the second magnetic layer 12and the fourth magnetic layer 14. For example, the first compound region42 a is formed by processing a portion of the magnetic film used to formthe second magnetic layer 12 and the fourth magnetic layer 14. Theportions that are not processed are used to form the second magneticlayer 12 and the fourth magnetic layer 14. The processing is oxidizingor nitriding. The processed portion (the first compound region 42 a)functions as an insulating film. The processing may include amorphizing.

The first compound region 42 a is provided between the insulatingportion 40 and the fifth portion 21 e. A second compound region 42 b maybe provided between the first compound region 42 a and the fifth portion21 e. For example, the second compound region 42 b may be formed bychanging a portion of the metal-containing film used to form themetal-containing layer 21. The second compound region 42 b includes, forexample, an oxide, nitride, or oxynitride of a metal included in themetal-containing layer 21.

The second compound region 42 b may be formed by the processing of thefirst compound region 42 a recited above. The boundary between the firstcompound region 42 a and the second compound region 42 b may be distinctor indistinct. The metal that is included in the second compound region42 b may be diffused into the first compound region 42 a. The metal thatis included in the first compound region 42 a may be diffused into thesecond compound region 42 b.

The first compound region 42 a may be discontinuous between the secondmagnetic layer 12 and the fourth magnetic layer 14. The first compoundregion 42 a may further include a metal included in the first magneticlayer 11 (or third magnetic layer 13).

In another magnetic memory device 110C according to the embodiment asshown in FIG. 4C, the crystal structure of the third portion 21 c of themetal-containing layer 21 is different from the crystal structure of theother portions (e.g., the first portion 21 a, the second portion 21 b,the fifth portion 21 e, etc.) of the metal-containing layer 21. Forexample, surface treatment or the like of a portion of themetal-containing film used to form the metal-containing layer 21 isperformed. On the other hand, the processing is not performed on theportions (the third portion 21 c, the fourth portion 21 d, etc.)positioned under the stacked bodies. The processing is, for example, theirradiation of a gas cluster ion beam. For example, an Ar cluster isirradiated. By such processing, the crystal structure of at least aportion of the processed portion is changed.

For example, the crystal structure of the third portion 21 c of themetal-containing layer 21 is the β-phase. The crystal structure of atleast a portion (e.g., the surface portion) of the other portions (e.g.,the first portion 21 a, the second portion 21 b, the fifth portion 21 e,etc.) of the metal-containing layer 21 is the α-phase. For example,information relating to these crystal structures is obtained byobservation using a transmission electron microscope, etc.

For example, per unit volume (unit surface area), the proportion of theβ-phase region of the third portion 21 c to the entire third portion 21c is higher than, for example, the proportion of the β-phase region ofthe other regions (e.g., the first portion 21 a, the second portion 21b, the fifth portion 21 e, etc.) to the entire other regions.

For example, at least a portion of the third portion 21 c includesβ-phase Ta. For example, at least a portion of the first portion 21 a(or the fifth portion 21 e) includes α-phase Ta. The absolute value ofthe spin Hall angle is large for β-phase Ta. On the other hand, theconductivity of α-phase Ta is higher than the conductivity of β-phaseTa.

By setting the crystal structures to be different as recited above, forexample, resistance reduction due to a higher conductivity can berealized; therefore, the program power can be reduced. The resistance ofthe metal-containing layer 21 can be low. Due to the decrease of theprogram power, for example, the capacity of the driver driving thememory unit can be reduced; and, for example, the size of the driver canbe small. The bit density can be increased.

FIG. 5A to FIG. 5H are schematic cross-sectional views illustratingother magnetic memory devices according to the first embodiment.

In a magnetic memory device 110 a as shown in FIG. 5A, the thicknessesof the first non-overlap region 21 ca and the second non-overlap region21 cb change in step configurations.

In a magnetic memory device 110 b as shown in FIG. 5B, the width in thethird direction (the Y-axis direction) of the third portion 21 c of themetal-containing layer 21 has a maximum at the central portion in thefirst direction (the Z-axis direction). The thicknesses of the firstnon-overlap region 21 ca and the second non-overlap region 21 cb changecontinuously.

In a magnetic memory device 110 c as shown in FIG. 5C, the width in thethird direction (the Y-axis direction) of the third portion 21 c of themetal-containing layer 21 has a maximum at the central portion in thefirst direction (the Z-axis direction). The thicknesses of the firstnon-overlap region 21 ca and the second non-overlap region 21 cb changein step configurations. In a magnetic memory device 110 d as shown inFIG. 5D, the third portion 21 c of the metal-containing layer 21 has asurface 21 cU opposing the second magnetic layer 12. The width along thethird direction (the Y-axis direction) of the surface 21 cU issubstantially the same as the width along the third direction of thesecond magnetic layer 12. For example, the width of the surface 21 cUrecited above is not less than 0.9 times and not more than 1.1 times thewidth of the second magnetic layer 12 recited above.

In a magnetic memory device 110 e as shown in FIG. 5E, the third portion21 c of the metal-containing layer 21 has the surface 21 cU opposing thesecond magnetic layer 12. The width along the third direction (theY-axis direction) of the surface 21 cU is wider than the width along thethird direction of the second magnetic layer 12.

In a magnetic memory device 110 f as shown in FIG. 5F, themetal-containing layer 21 has a surface 21 cL. The surface 21 cL is theopposite surface of the surface 21 cU. The width along the thirddirection (the Y-axis direction) of the surface 21 cU is wider than thewidth along the third direction (the Y-axis direction) of the surface 21cL. In the example, the width along the third direction (the Y-axisdirection) of the surface 21 cL is substantially the same as the widthalong the third direction of the second magnetic layer 12. For example,the width of the surface 21 cL recited above is not less than 0.9 timesand not more than 1.1 times the width of the second magnetic layer 12recited above.

In a magnetic memory device 110 g as shown in FIG. 5G as well, the widthalong the third direction (the Y-axis direction) of the surface 21 cU iswider than the width along the third direction (the Y-axis direction) ofthe surface 21 cL. In the example, the width along the third direction(the Y-axis direction) of the surface 21 cL is wider than the widthalong the third direction of the second magnetic layer 12.

In a magnetic memory device 110 h as shown in FIG. 5H as well, the widthalong the third direction (the Y-axis direction) of the surface 21 cU iswider than the width along the third direction (the Y-axis direction) ofthe surface 21 cL. In the example, the width along the third direction(the Y-axis direction) of the surface 21 cL is narrower than the widthalong the third direction of the second magnetic layer 12.

Thus, various modifications of the width of the metal-containing layer21 are possible in the embodiment.

In the embodiment, the center in the Y-axis direction of the stackedbody SB0 and the center in the Y-axis direction of the metal-containinglayer 21 may match or may be shifted. In the embodiment, at least one ofa difference of the tapered configurations or a difference of the taperangles may be provided in the two Y-axis direction end portions of themetal-containing layer 21.

In the embodiment, the length in the Y-axis direction of the secondmagnetic layer 12 may be shorter than the length in the Y-axis directionof the metal-containing layer 21. For example, the end portion in theY-axis direction of the magnetic film used to form the second magneticlayer 12 may be demagnetized by oxidizing, etc. The unoxidized magneticfilm is used to form the second magnetic layer 12. The second magneticlayer 12 may be formed of a magnetic region-like configuration due tothe oxidizing, etc. The metal-containing layer 21 may be formed of aconductive region-like configuration of the metal-containing film usedto form the metal-containing layer 21.

Examples of the metal-containing layer 21, the first magnetic layer 11,the second magnetic layer 12, and the first intermediate layer 11 i willnow be described. The following description relating to themetal-containing layer 21 is applicable to the other metal-containinglayers 21X (the metal-containing layer 21A, etc.). The followingdescription relating to the first magnetic layer 11 is applicable to thethird magnetic layer 13. The following description relating to thesecond magnetic layer 12 is applicable to the fourth magnetic layer 14.The following description relating to the first intermediate layer 11 iis applicable to the second intermediate layer 12 i.

The metal-containing layer 21 may include, for example, a materialhaving a high spin Hall effect. For example, the metal-containing layer21 contacts the second magnetic layer 12. For example, themetal-containing layer 21 provides spin-orbit torque to the secondmagnetic layer 12. For example, the metal-containing layer 21 mayfunction as a spin orbit layer (SOL). For example, the orientation ofthe second magnetization 12M of the second magnetic layer 12 can bechanged by the spin-orbit torque generated between the metal-containinglayer 21 and the second magnetic layer 12. For example, the direction ofthe second magnetization 12M can be controlled according to theorientation of the current (the orientation of the first program currentTw1 or the orientation of the second program current Iw2) flowingthrough the metal-containing layer 21.

The metal-containing layer 21 includes, for example, at least oneselected from the group consisting of tantalum and tungsten. Themetal-containing layer 21 includes, for example, at least one selectedfrom the group consisting of β-tantalum and β-tungsten. The spin Hallangle of these materials is negative. The absolute value of the spinHall angle of these materials is large. Thereby, the secondmagnetization 12M can be controlled efficiently by the program current.

The metal-containing layer 21 may include at least one selected from thegroup consisting of platinum and gold. The spin Hall angle of thesematerials is positive. The absolute value of the spin Hall angle ofthese materials is large. Thereby, the second magnetization 12M can becontrolled efficiently by the program current.

The direction (the orientation) of the spin-orbit torque applied to thesecond magnetic layer 12 is different due to the polarity of the spinHall angle. For example, the metal-containing layer 21 applies spinorbit interaction torque to the second magnetic layer 12.

The second magnetic layer 12 is, for example, a free magnetic layer. Thesecond magnetic layer 12 includes, for example, at least one of aferromagnetic material or a soft magnetic material. The second magneticlayer 12 may include, for example, an artificial lattice.

The second magnetic layer 12 includes, for example, at least oneselected from the group consisting of FePd (iron-palladium), FePt(iron-platinum), CoPd (cobalt-palladium), and CoPt (cobalt-platinum).The soft magnetic materials recited above include, for example, CoFeB(cobalt-iron-boron). The artificial lattice recited above includes, forexample, a stacked film including a first film and a second film. Thefirst film includes, for example, at least one of NiFe (nickel-iron), Fe(iron), or Co (cobalt). The second film includes, for example, at leastone of Cu (copper), Pd (palladium), or Pt (platinum). The first film is,for example, a magnetic material; and the second film is a nonmagneticmaterial.

The second magnetic layer 12 may include, for example, a ferrimagneticmaterial.

In the embodiment, for example, the second magnetic layer 12 hasin-plane magnetic anisotropy. Thereby, for example, polarized spin thatis antiparallel to the magnetization direction can be obtained from themetal-containing layer 21. For example, the second magnetic layer 12 mayhave at least one of shape magnetic anisotropy in the plane,magneto-crystalline anisotropy in the plane, or induced magneticanisotropy in the plane due to the stress or the like.

The first intermediate layer 11 i includes, for example, at least oneselected from the group consisting of MgO (magnesium oxide), CaO(calcium oxide), SrO (strontium oxide), TiO (titanium oxide), VO(vanadium oxide), NbO (niobium oxide), and Al₂O₃ (aluminum oxide). Thefirst intermediate layer 11 i is, for example, a tunneling barrierlayer. In the case where the first intermediate layer 11 i includes MgO,the thickness of the first intermediate layer 11 i is, for example,about 1 nm.

The first magnetic layer 11 is, for example, a reference layer. Thefirst magnetic layer 11 is, for example, a fixed magnetic layer. Thefirst magnetic layer 11 includes, for example, Co (cobalt) and CoFeB(cobalt-iron-boron). The first magnetization 11M of the first magneticlayer 11 is substantially fixed in one direction in the plane (adirection crossing the Z-axis direction). The first magnetic layer 11is, for example, an in-plane magnetization film.

For example, the thickness of the first magnetic layer 11 (the referencelayer) is thicker than the thickness of the second magnetic layer 12(the free layer). Thereby, the first magnetization 11M of the firstmagnetic layer 11 is fixed stably in the prescribed direction.

In the embodiment, for example, the base member 20 s is aluminum oxide.The metal-containing layer 21 is a Ta layer (having a thickness of, forexample, not less than 3 nm and not more than 10 nm). The secondmagnetic layer 12 includes, for example, a CoFeB layer (having athickness of, for example, not less than 1.5 nm and not more than 2.5nm). The first intermediate layer 11 i includes a MgO layer (having athickness of, for example, not less than 0.8 nm and not more than 1.2nm).

The first magnetic layer 11 includes first to third films. The firstfilm is provided between the third film and the first intermediate layer11 i. The second film is provided between the first film and the thirdfilm. The first film includes, for example, a CoFeB film (having athickness of, for example, not less than 1.5 nm and not more than 2.5nm). The second film includes, for example, a Ru film (having athickness of, for example, not less than 0.7 nm and not more than 0.9nm). The third film includes, for example, a CoFeB film (having athickness of, for example, not less than 1.5 nm and not more than 2.5nm).

For example, a ferromagnetic layer may be provided. The first magneticlayer 11 is provided between the ferromagnetic layer and the firstintermediate layer 11 i. The ferromagnetic layer is, for example, anIrMn-layer (having a thickness not less than 7 nm and not more than 9nm). The ferromagnetic layer fixes the first magnetization 11M of thefirst magnetic layer 11. A Ta layer may be provided on the ferromagneticlayer.

Second Embodiment

FIG. 6A to FIG. 6D are schematic views illustrating a magnetic memorydevice according to a second embodiment.

FIG. 6A is a perspective view. FIG. 6B is a line D1-D2 cross-sectionalview of FIG. 6A. FIG. 6C is a line E1-E2 cross-sectional view of FIG.6A. FIG. 6D is a line F1-F2 cross-sectional view of FIG. 6A.

As shown in FIG. 6A to FIG. 6D, the magnetic memory device 120 accordingto the embodiment also includes the metal-containing layer 21, the firstto fourth magnetic layers 11 to 14, the first intermediate layer 11 i,the second intermediate layer 12 i, and the controller 70.

In the example as well, the metal-containing layer 21 is provided on thebase member 20 s. The metal-containing layer 21 includes the first tofifth portions 21 a to 21 e. The third portion 21 c is positionedbetween the first portion 21 a and the second portion 21 b. The fourthportion 21 d is positioned between the third portion 21 c and the secondportion 21 b. The fifth portion 21 e is positioned between the thirdportion 21 c and the fourth portion 21 d.

The first magnetic layer 11 is separated from the third portion 21 c inthe first direction (e.g., the Z-axis direction). The first directioncrosses the second direction (e.g., the X-axis direction) from the firstportion 21 a toward the second portion 21 b. The second magnetic layer12 is provided between the first magnetic layer 11 and a portion of thethird portion 21 c. The first intermediate layer 11 i includes a portionprovided between the first magnetic layer 11 and the second magneticlayer 12. The first intermediate layer 11 i is nonmagnetic. The firstmagnetic layer 11, the second magnetic layer 12, and the firstintermediate layer 11 i are included in the first stacked body SB1.

The third magnetic layer 13 is separated from the fourth portion 21 d inthe first direction (the Z-axis direction). The fourth magnetic layer 14is provided between the third magnetic layer 13 and a portion of thefourth portion 21 d. The second intermediate layer 12 i includes aportion provided between the third magnetic layer 13 and the fourthmagnetic layer 14. The second intermediate layer 12 i is nonmagnetic.The third magnetic layer 13, the fourth magnetic layer 14, and thesecond intermediate layer 12 i are included in the second stacked bodySB2.

The controller 70 is electrically connected with the first portion 21 a,the second portion 21 b, the first magnetic layer 11, and the thirdmagnetic layer 13. In the example as well, the first switch element Sw1is provided in the current path between the first magnetic layer 11 andthe drive circuit 75 of the controller 70. The second switch element Sw2is provided in the current path between the drive circuit 75 and thethird magnetic layer 13.

In the example as well, in the first program operation, the controller70 forms the first state by supplying, to the metal-containing layer 21,the first program current Iw1 from the first portion 21 a toward thesecond portion 21 b. In the second program operation, the controller 70forms the second state by supplying, to the metal-containing layer 21,the second program current Iw2 from the second portion 21 b toward thefirst portion 21 a. The first electrical resistance between the firstmagnetic layer 11 and the first portion 21 a in the first state isdifferent from the second electrical resistance between the firstmagnetic layer 11 and the first portion 21 a in the second state.

The controller 70 forms the third state by supplying the first programcurrent Iw1 to the metal-containing layer 21. The controller 70 formsthe fourth state by supplying the second program current Iw2 to themetal-containing layer 21. The third electrical resistance between thethird magnetic layer 13 and the first portion 21 a in the third state isdifferent from the fourth electrical resistance between the thirdmagnetic layer 13 and the first portion 21 a in the fourth state.

In the read operation, the controller 70 may sense a characteristic(which may be a voltage, a current, or the like) corresponding to theelectrical resistance between the first magnetic layer 11 and the firstportion 21 a. In the read operation, the controller 70 may sense acharacteristic (which may be a voltage, a current, or the like)corresponding to the electrical resistance between the third magneticlayer 13 and the first portion 21 a.

In the example as shown in FIG. 6A, the width in the Y-axis direction ofthe metal-containing layer 21 is different between the third portion 21c and the fifth portion 21 e. Also, the width in the Y-axis direction ofthe metal-containing layer 21 is different between the fourth portion 21d and the fifth portion 21 e. Otherwise, for example, the configurationdescribed in reference to the magnetic memory device 110 is applicableto the magnetic memory device 120.

An example of the width in the Y-axis direction of the metal-containinglayer 21 will now be described.

As shown in FIG. 6A, the third portion 21 c of the metal-containinglayer 21 protrudes in the Y-axis direction using the second magneticlayer 12 as a reference.

For example, as shown in FIG. 6B, a length 21 cy is the length along thethird direction (e.g., the Y-axis direction) of the third portion 21 c.The third direction crosses the first direction (the Z-axis direction)and the second direction (the X-axis direction). For example, the thirddirection crosses a plane including the first direction (the Z-axisdirection) and the second direction (the X-axis direction). On the otherhand, a length 12 y is the length along the third direction of thesecond magnetic layer 12. The length 12 y is, for example, the averageof the length 12 yL and the length 12 yU described above. The length 21cy is longer than the length 12 y.

On the other hand, as shown in FIG. 6D, a length 21 ey is the lengthalong the third direction of the fifth portion 21 e of themetal-containing layer 21.

A length 12 cy of the third portion 21 c of the metal-containing layer21 recited above is longer than the length 21 ey along the thirddirection of the fifth portion 21 e recited above.

On the other hand, as shown in FIG. 6C, a length 21 dy along the thirddirection of the fourth portion 21 d of the metal-containing layer 21 islonger than a length 14 y along the third direction of the fourthmagnetic layer 14. The length 21 dy of the fourth portion 21 d recitedabove is longer than the length 21 ey of the fifth portion 21 e recitedabove (referring to FIG. 6D).

Thus, the widths along the Y-axis direction of the metal-containinglayer 21 at the portions (the third portion 21 c and the fourth portion21 d) where the stacked bodies are provided are wider than the widthalong the Y-axis direction of the metal-containing layer 21 at theportion (the fifth portion 21 e) where the stacked body is not provided.

For example, a third reference example may be considered in which thewidth in the Y-axis direction of the metal-containing layer 21 isconstant. For example, the conductance in the regions of themetal-containing layer 21 overlapping the stacked bodies is higher thanthe conductance in the region of the metal-containing layer 21 notoverlapping the stacked body. Therefore, in the third reference example,the current concentrates easily at the Y-axis direction ends of themetal-containing layer 21 compared to the central portion in the Y-axisdirection. For example, the dispersion (the fluctuation) in thedirection of the recording current due to the current concentrationcauses dispersion (fluctuation) in the direction of the spin current. Asa result, the dispersion of the spin coherence becomes large; and therecording current increases.

Conversely, in the embodiment, the widths along the Y-axis direction ofthe regions of the metal-containing layer 21 overlapping the stackedbodies are set to be locally wide. For example, the protruding portions(the first non-overlap region 21 ca and the second non-overlap region 21cb) are provided in the third portion 21 c. The protruding portions areused as spin localization regions. Thereby, compared to the thirdreference example recited above, the current concentration at the Y-axisdirection ends of the metal-containing layer 21 can be suppressed. Forexample, the distribution of the program current is uniform. Thereby,the effect of the spin-orbit torque is obtained effectively. Forexample, the control of the second magnetization 12M of the secondmagnetic layer 12 by the program current is performed efficiently.

Thereby, for example, the magnetic memory device can be provided inwhich the program current can be reduced. In the embodiment as well, thebit density can be increased.

For example, the difference of the widths such as that recited above isdue to the non-overlap regions provided in the third portion 21 c andthe fourth portion 21 d.

In other words, the third portion 21 c includes the first overlap region21 cc, the first non-overlap region 21 ca, and the second non-overlapregion 21 cb. The first overlap region 21 cc overlaps the secondmagnetic layer 12 in the first direction (the Z-axis direction). Thefirst non-overlap region 21 ca does not overlap the second magneticlayer 12 in the first direction. The second non-overlap region 21 cbdoes not overlap the second magnetic layer 12 in the first direction.The direction from the first non-overlap region 21 ca toward the secondnon-overlap region 21 cb is aligned with the third direction (the Y-axisdirection). The first overlap region 21 cc is positioned between thefirst non-overlap region 21 ca and the second non-overlap region 21 cbin the third direction.

Similarly, the fourth portion 21 d includes the second overlap region 21dc, the third non-overlap region 21 da, and the fourth non-overlapregion 21 db. The second overlap region 21 dc overlaps the fourthmagnetic layer 14 in the first direction (the Z-axis direction). Thethird non-overlap region 21 da does not overlap the fourth magneticlayer 14 in the first direction. The fourth non-overlap region 21 dbdoes not overlap the fourth magnetic layer 14 in the first direction.The direction from the third non-overlap region 21 da toward the fourthnon-overlap region 21 db is aligned with the third direction (the Y-axisdirection). The second overlap region 21 dc is positioned between thethird non-overlap region 21 da and the fourth non-overlap region 21 dbin the third direction.

In the embodiment, the thicknesses of the non-overlap regions may be thesame as the thickness of the overlap region. In the embodiment, thethicknesses of the non-overlap regions may be thicker than the thicknessof the overlap region. As described below, the thicknesses of thenon-overlap regions may be thinner than the thickness of the overlapregion.

FIG. 7 is a schematic plan view illustrating the magnetic memory deviceaccording to the second embodiment.

As shown in FIG. 7, the multiple electrodes 22X and the multiplemetal-containing layers 21X may be provided in the magnetic memorydevice 120. The multiple electrodes 22X and the multiplemetal-containing layers 21X are as described in reference to FIG. 3B.For example, the stacked bodies SB0 are provided between the multipleelectrodes 22X and the multiple metal-containing layers 21X. Forexample, the first stacked body SB1 is provided between themetal-containing layer 21 and the electrode 22. The second stacked bodySB2 is provided between the metal-containing layer 21 and the electrode22A.

In the example, the position of the end of the fifth portion 21 e of themetal-containing layer 21 is substantially aligned with the position ofthe end of the second magnetic layer 12 (the position of the end of thefirst stacked body SB1). For example, the length 21 ey along the thirddirection (the Y-axis direction) of the fifth portion 21 e is not lessthan 0.9 times and not more than 1.1 times the length 12 y along thethird direction of the second magnetic layer 12.

One stacked body SB1 may be provided in the embodiment. For example, themagnetic memory device 120 shown in FIG. 6A may include themetal-containing layer 21, the first magnetic layer 11, the secondmagnetic layer 12, the first intermediate layer 11 i, and the controller70. In such a case as well, the length 21 cy of the third portion 21 calong the third direction (the Y-axis direction) crossing the firstdirection and the second direction (referring to FIG. 6B) is longer thanthe length 12 y along the third direction of the second magnetic layer12. The length 21 cy of the third portion 21 c is longer than the length(e.g., the length 21 ey shown in FIG. 6D) along the third direction of aportion (which may be, for example, the fifth portion 21 e shown in FIG.6A) between the third portion 21 c and the second portion 21 b. In sucha case as well, the controller 70 implements the first and secondprogram operations recited above. In such a case as well, the firstelectrical resistance between the first magnetic layer 11 and one of thefirst portion 21 a or the second portion 21 b after the first programoperation is different from the second electrical resistance between thefirst magnetic layer 11 and the one of the first portion 21 a or thesecond portion 21 b recited above after the second program operation. Insuch a magnetic memory device as well, a magnetic memory device can beprovided in which the bit density can be increased.

FIG. 8A and FIG. 8B are schematic cross-sectional views illustrating amagnetic memory device according to the second embodiment.

FIG. 8A is a cross-sectional view corresponding to line D1-D2 of FIG.6A. FIG. 8B is a cross-sectional view corresponding to line E1-E2 ofFIG. 6A.

In the other magnetic memory device 121 according to the embodiment asshown in FIG. 8A, the third portion 21 c of the metal-containing layer21 includes the first overlap region 21 cc, the first non-overlap region21 ca, and the second non-overlap region 21 cb. In the example, thethickness along the first direction (the Z-axis direction) of at least aportion of the first non-overlap region 21 ca is thinner than the firstoverlap region thickness 21 cct along the first direction of the firstoverlap region 21 cc. The thickness along the first direction of atleast a portion of the second non-overlap region 21 cb is thinner thanthe first overlap region thickness 21 cct recited above.

As shown in FIG. 8B, the fourth portion 21 d includes the second overlapregion 21 dc, the third non-overlap region 21 da, and the fourthnon-overlap region 21 db. The thickness along the first direction (theZ-axis direction) of at least a portion of the third non-overlap region21 da is thinner than the second overlap region thickness 21 dct alongthe first direction of the second overlap region 21 dc. The thicknessalong the first direction of at least a portion of the fourthnon-overlap region 21 db is thinner than the second overlap regionthickness 21 dct recited above.

Otherwise, the magnetic memory device 121 is similar to the magneticmemory device 120.

In the magnetic memory device 121, for example, the coherency of thespin polarization can be maintained by setting the non-overlap region tobe thin. The recording current can be suppressed while increasing thetransfer efficiency of the spin torque. Thereby, the efficiency of theprogramming increases. Thereby, the program current can be reduced.Thereby, the bit density can be increased further.

In the magnetic memory device 121 as well, the first overlap region 21cc of the third portion 21 c overlaps the second magnetic layer 12 inthe first direction (the Z-axis direction). The first non-overlap region21 ca does not overlap the second magnetic layer 12 in the firstdirection. The second non-overlap region 21 cb does not overlap thesecond magnetic layer 12 in the first direction. The direction from thefirst non-overlap region 21 ca toward the second non-overlap region 21cb is aligned with the third direction (the Y-axis direction). The firstoverlap region 21 cc is positioned between the first non-overlap region21 ca and the second non-overlap region 21 cb in the third direction.

Similarly, the fourth portion 21 d includes the second overlap region 21dc, the third non-overlap region 21 da, and the fourth non-overlapregion 21 db. The second overlap region 21 dc overlaps the fourthmagnetic layer 14 in the first direction (the Z-axis direction). Thethird non-overlap region 21 da does not overlap the fourth magneticlayer 14 in the first direction. The fourth non-overlap region 21 dbdoes not overlap the fourth magnetic layer 14 in the first direction.The direction from the third non-overlap region 21 da toward the fourthnon-overlap region 21 db is aligned with the third direction (the Y-axisdirection). The second overlap region 21 dc is positioned between thethird non-overlap region 21 da and the fourth non-overlap region 21 dbin the third direction.

In the magnetic memory device 121, the ratio of the total of the length21 cay along the third direction (the Y-axis direction) of the firstnon-overlap region 21 ca and the length 21 cby along the third directionof the second non-overlap region 21 cb to the first overlap regionthickness 21 cct is taken as the first ratio.

A portion of the configuration of the magnetic memory device 110(referring to FIG. 1B) is applicable to the magnetic memory device 121.In the magnetic memory device 121 as well, the thickness of the secondmagnetic layer 12 (the thickness of the second magnetic layer along thefirst direction) is taken as the thickness t12 (referring to FIG. 1B).The length along the second direction of the surface 12L of the secondmagnetic layer 12 opposing the metal-containing layer 21 is taken as thelength 12 xL. The length along the second direction of the surface 12Uof the second magnetic layer 12 opposing the first intermediate layer 11i is taken as the length 12 xU.

For example, the first ratio recited above is higher than the ratio ofthe absolute value of the difference between the length 12 xL and thelength 12 xU to the thickness t12. For example, the dispersion of thespin coherence can be suppressed by setting the width in the Y-axisdirection of the non-overlap region to be large. The efficiency of theprogramming increases; and the program current can be reduced.

FIG. 9A to FIG. 9C are schematic cross-sectional views illustratingother magnetic memory devices according to the second embodiment.

As shown in FIG. 9A, the metal-containing layer 21, the first stackedbody SB1, and the second stacked body SB2 are provided in anothermagnetic memory device 122A according to the embodiment as well. In themagnetic memory device 122A, the thickness 21 et along the firstdirection (the Z-axis direction) of the fifth portion 21 e of themetal-containing layer 21 is thinner than the first overlap regionthickness 21 cct. The thickness 2 let is thinner than the second overlapregion thickness 21 dct. For example, the spin coherence is improved byproviding such a difference between the thicknesses.

The compound layer 41 is provided in the example. The compound layer 41includes a compound including a metal included in the second magneticlayer 12 (or the fourth magnetic layer 14). The compound layer 41opposes the side surface 12 s of the second magnetic layer 12. Thecompound layer 41 opposes the side surface 14 s of the fourth magneticlayer 14. For example, the leakage current at the side surfaces of thestacked body can be suppressed by the compound layer 41.

As shown in FIG. 9B, the first compound region 42 a (the compound layer)is provided in another magnetic memory device 122B according to theembodiment. The first compound region 42 a includes a compound includinga metal included in the second magnetic layer 12 (or the fourth magneticlayer 14). The first compound region 42 a opposes the side surface 12 sof the second magnetic layer 12 and the side surface 14 s of the fourthmagnetic layer 14. The first compound region 42 a is provided to becontinuous between the second magnetic layer 12 and the fourth magneticlayer 14.

The second compound region 42 b may be provided between the firstcompound region 42 a and the fifth portion 21 e. The second compoundregion 42 b includes, for example, an oxide, nitride, or oxynitride of ametal included in the metal-containing layer 21.

In another magnetic memory device 122C according to the embodiment shownin FIG. 9C, the crystal structure of the third portion 21 c of themetal-containing layer 21 is different from the crystal structure of theother portions (e.g., the first portion 21 a, the second portion 21 b,the fifth portion 21 e, etc.) of the metal-containing layer 21.

For example, the crystal structure of the third portion 21 c of themetal-containing layer 21 is the 3-phase. The crystal structure of atleast a portion (e.g., the surface portion) of the other portions (e.g.,the first portion 21 a, the second portion 21 b, the fifth portion 21 e,etc.) of the metal-containing layer 21 is the α-phase.

For example, per unit volume (unit surface area), the proportion of theβ-phase region of the third portion 21 c to the entire third portion 21c is higher than, for example, the proportion of the β-phase region ofthe other regions (e.g., the first portion 21 a, the second portion 21b, the fifth portion 21 e, etc.) to the entire other regions.

For example, at least a portion of the third portion 21 c includesβ-phase Ta. For example, at least a portion of the first portion 21 a(or the fifth portion 21 e) includes α-phase Ta. For example, a highspin Hall effect is obtained; and the program current can be reduced.The resistance of the metal-containing layer 21 can be low.

FIG. 10A to FIG. 10D are schematic plan views illustrating othermagnetic memory devices according to the second embodiment.

In a magnetic memory device 123 a as shown in FIG. 10A, the length 21 eyalong the third direction (the Y-axis direction) of the fifth portion 21e is substantially the same as the length 12 y along the third directionof the second magnetic layer 12. For example, the length 21 ey is notless than 0.9 times and not more than 1.1 times the length 12 y.

In a magnetic memory device 123 b as shown in FIG. 10B, the length 21 eyalong the third direction (the Y-axis direction) of the fifth portion 21e is longer than the length 12 y along the third direction of the secondmagnetic layer 12.

In a magnetic memory device 123 c as shown in FIG. 10C, the width in thesecond direction (the X-axis direction) of the first non-overlap region21 ca is substantially the same as the width along the second directionof the second magnetic layer 12. For example, the width in the seconddirection of the first non-overlap region 21 ca is not less than 0.9times and not more than 1.1 times the width along the second directionof the second magnetic layer 12.

In a magnetic memory device 123 d as shown in FIG. 10D, the width in thesecond direction (the X-axis direction) of the first non-overlap region21 ca is narrower than the width along the second direction of thesecond magnetic layer 12.

Third Embodiment

A third embodiment relates to a method for manufacturing the magneticmemory device according to the second embodiment.

FIG. 11 is a flowchart illustrating the method for manufacturing themagnetic memory device according to the third embodiment.

FIG. 12A to FIG. 12D, FIG. 13A to FIG. 13E, FIG. 14A to FIG. 14C, FIG.15A, and FIG. 15B are schematic views illustrating the method formanufacturing the magnetic memory device according to the thirdembodiment.

FIG. 12A, FIG. 12C, FIG. 13D, FIG. 14A to FIG. 14C, FIG. 15A, and FIG.15B are schematic plan views. FIG. 12B, FIG. 12D, FIG. 13A to FIG. 13C,and FIG. 13E are schematic cross-sectional views.

As shown in FIG. 11, a stacked film is formed on a metal-containing filmprovided on the base member 20 s (step S110).

For example, as shown in FIG. 12B, a metal-containing film 21F (e.g., aTa film) is provided on the base member 20 s (e.g., an aluminum oxidesubstrate).

The first direction (the Z-axis direction) is a direction perpendicularto a surface 21Fa of the metal-containing film 21F. The X-axis directionis one direction perpendicular to the Z-axis direction. The Y-axisdirection is a direction perpendicular to the Z-axis direction and theX-axis direction.

The metal-containing film 21F is used to form the metal-containing layer21. A stacked film SBF is provided on the metal-containing film 21F. Thestacked film SBF includes a first magnetic film 11F, a second magneticfilm 12F, and an intermediate film 11 iF. The second magnetic film 12Fis provided between the first magnetic film 11F and the metal-containingfilm 21F. The intermediate film 11 iF is provided between the firstmagnetic film 11F and the second magnetic film 12F. The intermediatefilm 11 iF is nonmagnetic.

A first mask M1 is further formed on the stacked film SBF. The firstmask M1 includes, for example, a tungsten film Mb1 (e.g., having athickness not less than 25 nm and not more than 35 nm) and a rutheniumfilm Mal (e.g., having a thickness not less than 1 nm and not more than3 nm). The ruthenium film Mal is provided between the tungsten film Mb1and the stacked film SBF.

As shown in FIG. 12A, the first mask M1 has a configuration of multipleband configurations extending in the Y-axis direction. The stacked filmSBF is exposed in the openings of the first mask M1. The first mask M1may be formed by, for example, double patterning technology.

As shown in FIG. 12C and FIG. 12D, the stacked film SBF is patternedusing the first mask Ml. For example, an ion beam IB1 is irradiated. Aportion of the stacked film SBF is removed. The metal-containing film21F remains. Thereby, multiple first trenches T1 are formed. Themultiple first trenches T1 are arranged in the second direction (theX-axis direction) crossing the first direction. The multiple firsttrenches T1 extend along the third direction (in the example, the Y-axisdirection). The third direction crosses the first direction and thesecond direction. For example, the third direction crosses a planeincluding the first direction and the second direction. The firsttrenches T1 reach the metal-containing film 21F. The stacked film SBF isdivided by the first trenches T1.

Thus, in the manufacturing method, the multiple first trenches T1 areformed (step S120 referring to FIG. 11).

For example, plasma processing is performed as shown in FIG. 13A.Thereby, a compound film 43 is formed on the side wall of the stackedfilm SBF. The plasma processing is oxygen plasma processing or nitrogenplasma processing. For example, the compound film 43 includes a compoundincluding an element included in the metal-containing film 21F. Thecompound film 43 is, for example, a protective film.

As shown in FIG. 13B, a first insulating film 44 a is formed inside thefirst trenches T1. The first insulating film 44 a is, for example, a SiNfilm.

A second insulating film 44 b is formed as shown in FIG. 13C. The secondinsulating film 44 b is, for example, a stacked film including analuminum oxide film and a silicon oxide film. Subsequently,planarization is performed.

Thereby, a first insulating portion In1 is formed inside the firsttrenches T1 as shown in FIG. 13D and FIG. 13E. The first insulatingportion In1 includes, for example, the compound film 43 recited above.The first insulating portion In1 includes the first insulating film 44 arecited above. The first insulating portion In1 may include the secondinsulating film 44 b recited above.

The formation of the first insulating portion In1 corresponds to stepS130 of FIG. 11.

Subsequently, multiple second trenches are formed as shown in FIG. 11(step S140 referring to FIG. 11).

For example, as shown in FIG. 14A, a second mask M2 is formed on thepatterning body. The second mask M2 has a configuration of multiple bandconfigurations extending along the second direction (the X-axisdirection). The patterning body is patterned using the second mask M2.For example, a portion of the first insulating portion In1 and a portionof the stacked film SBF after the formation of the first insulatingportion In1 that are exposed in the openings of the second mask M2 areremoved. Thereby, multiple second trenches T2 are formed. The multiplesecond trenches T2 extend in the second direction (e.g., the X-axisdirection). As described above, the direction (the third direction) inwhich the multiple first trenches T1 extend crosses the first directionand the second direction. The second direction may be tilted withrespect to the third direction; or the second direction may beperpendicular to the third direction.

For example, the width in the Y-axis direction of the second mask M2 canbe changed by processing (e.g., the irradiation of an ion beam) usingthe second mask M2. For example, slimming of the second mask M2 isperformed. In the processing, for example, a difference of the etchingrates can be caused between the stacked film SBF and the firstinsulating portion In1. Thereby, for example, the width in the Y-axisdirection of one stacked film SBF can be set to be wider than the widthin the Y-axis direction of the first insulating portion In1.

For example, as shown in FIG. 14B, one of the multiple second trenchesT2 includes a first trench region Tp2 and a second trench region Tq2.The first trench region Tp2 overlaps the stacked film SBF in the thirddirection (the Y-axis direction). The second trench region Tq2 overlapsthe first insulating portion In1 in the third direction (the Y-axisdirection). A width wTp2 along the third direction of the first trenchregion Tp2 is narrower than a width wTq2 along the third direction ofthe second trench region Tq2.

Subsequently, as shown in FIG. 11, the metal-containing film 21F that isexposed at the multiple second trenches T2 is removed (step S150). Asecond insulating portion is formed inside the multiple second trenchesT2 (step S160).

For example, as shown in FIG. 14C, the metal-containing film 21F that isexposed at the multiple second trenches T2 is removed. The base member20 s that is provided under the removed metal-containing film 21F isexposed.

As shown in FIG. 15A, the second insulating portion In2 is formed insidethe multiple second trenches T2. In such a case, the material of thesecond insulating portion In2 may be different from the material of thefirst insulating portion In1. For example, the first insulating portionIn1 includes silicon nitride; and the second insulating portion In2includes silicon oxide. For example, the first insulating portion In1includes silicon nitride; and the second insulating portion In2 includesaluminum oxide.

For example, there is a difference between the stress occurring in thedifferent materials. For example, mutually-different stress can beobtained by using mutually-different materials as the two insulatingportions. For example, mutually-different stress is generated in theX-axis direction and the Y-axis direction in the second magnetic layer12 and the fourth magnetic layer 14. Thereby, uniaxial anisotropy can beprovided in these magnetic layers. Thereby, the magnetizations of thesemagnetic layers are stabilized. A stable memory operation is obtained.

As shown in FIG. 15B, a magnetic memory device is made in which theelectrode 22, the electrode 22A, etc., are formed.

Fourth Embodiment

FIG. 16 is a schematic cross-sectional view illustrating a magneticmemory device according to a fourth embodiment.

As shown in FIG. 16, a conductive portion 24 is provided in the magneticmemory device 142 according to the embodiment. Otherwise, for example,at least portions of the configurations described in reference to themagnetic memory devices 110, 120, etc., are applicable to the magneticmemory device 142.

For example, the conductive portion 24 is electrically connected withthe fifth portion 21 e. For example, the conductive portion 24 contactsthe fifth portion 21 e. The metal-containing layer 21 is providedbetween the position of the stacked body SB0 and the position of theconductive portion 24 in the Z-axis direction. For example, the multiplestacked bodies SB0 are provided on the upper surface of themetal-containing layer 21. For example, the conductive portion 24 isprovided on the lower surface of the metal-containing layer 21.

By providing the conductive portion 24, the resistance between the firstportion 21 a and the second portion 21 b of the metal-containing layer21 can be reduced.

In the example, the conductive portion 24 includes a first conductivelayer 24 a and a second conductive layer 24 b. The first conductivelayer 24 a is provided between the metal-containing layer 21 and thesecond conductive layer 24 b. The first conductive layer 24 a includes,for example, at least one of copper, tungsten, titanium nitride, orcarbon. The second conductive layer 24 b includes, for example, at leastone of copper, tungsten, titanium nitride, or carbon.

FIG. 17 is a schematic view illustrating another magnetic memory deviceaccording to the fourth embodiment.

As shown in FIG. 17, first to fourth transistors TR1 to TR3 are providedin the other magnetic memory device 143 according to the embodiment.Otherwise, for example, at least portions of the configurationsdescribed in reference to the magnetic memory devices 110, 120, etc.,are applicable to the magnetic memory device 143.

One end of the first transistor TR1 is electrically connected with thefirst portion 21 a of the metal-containing layer 21. Another end of thefirst transistor TR1 is electrically connected with the drive circuit75. One end of the second transistor TR2 is electrically connected withthe second portion 21 b of the metal-containing layer 21. Another end ofthe second transistor TR2 is electrically connected with the drivecircuit 75. One end of the third transistor TR3 is electricallyconnected with the fifth portion 21 e of the metal-containing layer 21.Another end of the third transistor TR3 is electrically connected withthe drive circuit 75. For example, these transistors are included in thecontroller 70. These transistors may be considered to be providedseparately from the controller 70.

The desired current (the program current) of the metal-containing layer21 is caused to flow according to the potentials of a first gate G1 ofthe first transistor TR1, a second gate G2 of the second transistor TR2,and a third gate G3 of the third transistor TR3.

For example, the program current flows from the first portion 21 atoward the fifth portion 21 e. For example, the program current flowsfrom the fifth portion 21 e toward the first portion 21 a. For example,the program current flows from the second portion 21 b toward the fifthportion 21 e. For example, the program current flows from the fifthportion 21 e toward the second portion 21 b. Any combination of thedirections of the currents is obtained.

The number of transistors for the control can be reduced by providing atransistor at a middle position (e.g., the fifth portion 21 e) of themetal-containing layer 21. For example, a magnetic memory device havinga large capacity is obtained. For example, the memory capacity for thesize of the entire magnetic memory device can be increased. The bitdensity can be increased.

Fifth Embodiment

FIG. 18 is a schematic view illustrating a magnetic memory deviceaccording to a fifth embodiment.

As shown in FIG. 18, the magnetic memory device 151 according to theembodiment includes a first metal-containing layer 31, a secondmetal-containing layer 32, the multiple first stacked bodies SB1, themultiple second stacked bodies SB2, a third stacked body SB3, and thecontroller 70.

The first metal-containing layer 31 includes a first portion 31 a, asecond portion 31 b, and a first intervening portion 31 m. The firstintervening portion 31 m is provided between the first portion 31 a andthe second portion 31 b.

The second metal-containing layer 32 includes a third portion 32 c, afourth portion 32 d, and a second intervening portion 32 m. The secondintervening portion 32 m is provided between the third portion 32 c andthe fourth portion 32 d. The second portion 31 b is provided between thefirst portion 31 a and the fourth portion 32 d. The third portion 32 cis provided between the second portion 31 b and the fourth portion 32 d.

In the example, the first metal-containing layer 31 and the secondmetal-containing layer 32 are provided on the base member 20 s.

The multiple first stacked bodies SB1 are arranged along the firstmetal-containing layer 31. One of the multiple first stacked bodies SB1includes the first magnetic layer 11, the second magnetic layer 12, andthe first intermediate layer 11 i. The first magnetic layer 11 isseparated from the first intervening portion 31 m in the first direction(e.g., the Z-axis direction). The second magnetic layer 12 is providedbetween the first intervening portion 31 m and the first magnetic layer11. The first intermediate layer 11 i includes a portion providedbetween the first magnetic layer 11 and the second magnetic layer 12.The first intermediate layer 11 i is nonmagnetic. In the firstmetal-containing layer 31, the direction from the first portion 31 atoward the second portion 31 b is taken as the second direction (e.g.,the X-axis direction). The first direction (e.g., the Z-axis direction)recited above crosses the second direction. Each of the multiple firststacked bodies SB1 has a configuration including the first magneticlayer 11, the second magnetic layer 12, and the first intermediate layer11 i recited above. For example, the second magnetic layer 12 contactsthe first metal-containing layer 31.

The multiple second stacked bodies SB2 are arranged along the secondmetal-containing layer 32. One of the multiple second stacked bodies SB2includes the third magnetic layer 13, the fourth magnetic layer 14, andthe second intermediate layer 12 i. The third magnetic layer 13 isseparated from the second intervening portion 32 m in the firstdirection (the Z-axis direction). The fourth magnetic layer 14 isprovided between the second intervening portion 32 m and the thirdmagnetic layer 13. The second intermediate layer 12 i includes a portionprovided between the third magnetic layer 13 and the fourth magneticlayer 14. The second intermediate layer 12 i is nonmagnetic. Each of themultiple second stacked bodies SB2 has a configuration including thethird magnetic layer 13, the fourth magnetic layer 14, and the secondintermediate layer 12 i recited above. For example, the fourth magneticlayer 14 contacts the second metal-containing layer 32.

The third stacked body SB3 is provided between the multiple firststacked bodies SB1 and the multiple second stacked bodies SB2. The thirdstacked body SB3 includes a fifth magnetic layer 15.

For example, the fifth magnetic layer 15 is arranged with the secondmagnetic layer 12 and the fourth magnetic layer 14 inside the X-Y plane(a plane perpendicular to the first direction). For example, the fifthmagnetic layer 15 includes a material included in at least one of thesecond magnetic layer 12 or the fourth magnetic layer 14.

In the example, the third stacked body SB3 further includes a sixthmagnetic layer 16 and a third intermediate layer 13 i. The sixthmagnetic layer 16 is arranged with the first magnetic layer 11 and thethird magnetic layer 13 in the plane (the X-Y plane) recited above. Thethird intermediate layer 13 i is arranged with the first intermediatelayer 11 i and the second intermediate layer 12 i in the plane recitedabove. In the embodiment, at least one of the sixth magnetic layer 16 orthe third intermediate layer 13 i may be omitted.

The controller 70 is electrically connected with the first portion 31 a,the second portion 31 b, the third portion 32 c, the fourth portion 32d, the multiple first stacked bodies SB1, and the multiple secondstacked bodies SB2. In the drawing, the controller 70 is drawn as beingdivided into two for easier viewing of the drawing.

In the example, the first switch elements Sw1 are provided respectivelybetween the drive circuit 75 and the multiple first stacked bodies SB1.The second switch elements Sw2 are provided respectively between thedrive circuit 75 and the multiple second stacked bodies SB2. The firsttransistor TR1 is provided between the first portion 31 a and the drivecircuit 75. The second transistor TR2 is provided between the secondportion 31 b and the drive circuit 75. The third transistor TR3 isprovided between the third portion 32 c and the drive circuit 75. Afourth transistor TR4 is provided between the fourth portion 32 d andthe drive circuit 75.

In the first program operation, the controller 70 forms the first stateby supplying, to the first metal-containing layer 31, the first programcurrent Iw1 from the first portion 31 a toward the second portion 31 b.In the second program operation, the controller 70 forms the secondstate by supplying, to the first metal-containing layer 31, the secondprogram current Iw2 from the second portion 31 b toward the firstportion 31 a. The first electrical resistance between the first magneticlayer 11 and one of the first portion 31 a or the second portion 31 b inthe first state is different from the second electrical resistancebetween the first magnetic layer 11 and the one of the first portion 31a or the second portion 31 b recited above in the second state.

In the third program operation, the controller 70 forms the third stateby supplying, to the second metal-containing layer 32, a third programcurrent Iw3 from the third portion 32 c toward the fourth portion 32 d.In the fourth program operation, the controller 70 forms the fourthstate by supplying, to the second metal-containing layer 32, a fourthprogram current Iw4 from the fourth portion 32 d toward the thirdportion 32 c. The third electrical resistance between the third magneticlayer 13 and one of the third portion 32 c or the fourth portion 32 d inthe third state is different from the fourth electrical resistancebetween the third magnetic layer 13 and the one of the third portion 32c or the fourth portion 32 d in the second state.

For example, the selection of the multiple first stacked bodies SB1 iscontrolled by the voltages applied to the first magnetic layers 11included in the multiple first stacked bodies SB1.

For example, the controller 70 is electrically connected with the firstmagnetic layer 11 included in each of the multiple first stacked bodiesSB1. In the first and second program operations, the controller 70 setsthe potential of the first magnetic layer 11 included in one of themultiple first stacked bodies SB1 to a potential (e.g., the selectpotential) that is different from the potential (e.g., the unselectpotential) of the first magnetic layer 11 included in one other of themultiple first stacked bodies SB1.

For example, the controller 70 is electrically connected with the thirdmagnetic layers 13 included in the multiple second stacked bodies SB2.In the third and fourth program operations, the controller 70 sets thepotential of the third magnetic layer 13 included in one of the multiplesecond stacked bodies SB2 to a potential (e.g., the select potential)that is different from the potential (e.g., the unselect potential) ofthe third magnetic layer 13 included in one other of the multiple secondstacked bodies SB2.

In the magnetic memory device 151, for example, at least portions of theconfigurations described in reference to the metal-containing layer 21of the magnetic memory devices 110, 120, etc., are applicable to thefirst metal-containing layer 31 and the second metal-containing layer32. In the magnetic memory device 151, for example, at least portions ofthe configurations described in reference to the first stacked body SB1of the magnetic memory devices 110, 120, etc., are applicable to themultiple first stacked bodies SB1 and the multiple second stacked bodiesSB2. In the magnetic memory device 151, for example, at least portionsof the configurations described in reference to the magnetic memorydevices 110 and 120 are applicable to the controller 70.

The first metal-containing layer 31 and the multiple first stackedbodies SB1 form one memory column (memory string). The secondmetal-containing layer 32 and the multiple second stacked bodies SB2form one other memory column (memory string).

The third stacked body SB3 is provided between these memory portions.For example, the controller 70 is electrically insulated from the fifthmagnetic layer 15 of the third stacked body SB3. The third stacked bodySB3 is not used as a memory portion. For example, the third stacked bodySB3 functions as a dummy element.

For example, the multiple first stacked bodies SB1 include stackedbodies (end stacked bodies) positioned at the ends of the multiple firststacked bodies SB1, and stacked bodies (center stacked bodies)positioned at the central portion of the multiple first stacked bodiesSB1. Other stacked bodies exist at the two sides of the center stackedbodies. One of the center stacked bodies is affected by another stackedbody (e.g., one stacked body) provided on each of the two sides of theone of the center stacked bodies. On the other hand, in a referenceexample in which the third stacked body SB3 is not provided, the otherstacked body does not exist at one of the end stacked bodies. An effectarises from the stacked body provided on one side of the end stackedbody. Therefore, in the reference example, there are cases where thecharacteristics of the end stacked bodies of the multiple first stackedbodies SB1 are different from those of the center stacked bodies.

In such a case, in the embodiment, the characteristics of the endstacked bodies approach the characteristics of the center stacked bodiesby providing the third stacked body SB3. Thereby, for example, stablememory operations are possible. For example, the yield can be improved.For example, stable operations are obtained even when the size of eachof the multiple stacked bodies SB0 is small. The bit density can beincreased.

In the embodiment, a first distance d1 is the distance between two (themost proximal two) of the multiple first stacked bodies SB1. A seconddistance d2 is the distance between two (the most proximal two) of themultiple second stacked bodies SB2. For example, a third distance d3between the third stacked body SB3 and one of the multiple first stackedbodies SB1 is substantially the first distance d1. For example, thethird distance d3 is not less than 0.5 times and not more than 2 timesthe first distance d1. For example, a fourth distance d4 between thethird stacked body SB3 and one of the multiple second stacked bodies SB2is substantially the second distance d2. The fourth distance d4 is notless than 0.5 times and not more than 2 times the second distance d2.

By providing the third stacked body SB3 at the vicinity of one of themultiple first stacked bodies SB1, for example, stable operations areobtained easily for the one of the multiple first stacked bodies SB1. Byproviding the third stacked body SB3 at the vicinity of one of themultiple second stacked bodies SB2, for example, stable operations areobtained easily for the one of the multiple second stacked bodies SB2.

In the embodiment, the first metal-containing layer 31 and the secondmetal-containing layer 32 may be insulated from each other. The firstmetal-containing layer 31 and the second metal-containing layer 32 maybe electrically connected with each other.

In the example, a third metal-containing layer 33 is provided betweenthe first metal-containing layer 31 and the second metal-containinglayer 32. The third metal-containing layer 33 also is provided on thebase member 20 s. The third metal-containing layer 33 is providedbetween the second portion 31 b of the first metal-containing layer 31and the third portion 32 c of the second metal-containing layer 32. Forexample, the third metal-containing layer 33 includes a material of thefirst metal-containing layer 31.

A first insulating region 35 a and a second insulating region 35 b areprovided in the example. The first insulating region 35 a is providedbetween the second portion 31 b and the third metal-containing layer 33.The first insulating region 35 a electrically insulates between thesecond portion 31 b and the third metal-containing layer 33. The secondinsulating region 35 b is provided between the third portion 32 c andthe third metal-containing layer 33. The second insulating region 35 belectrically insulates between the third portion 32 c and the thirdmetal-containing layer 33. The first insulating region 35 a may includeone of an oxide of the first metal included in the firstmetal-containing layer 31, a nitride of the first metal, or anoxynitride of the first metal.

An example of the method for manufacturing the magnetic memory device151 will now be described.

FIG. 19A and FIG. 19B are schematic cross-sectional views illustratingthe method for manufacturing the magnetic memory device according to thefifth embodiment.

As shown in FIG. 19A, a metal-containing film 31FM is provided on thebase member 20 s. A portion of the metal-containing film 31FM is used toform the first metal-containing layer 31; and another portion of themetal-containing film 31FM is used to form the second metal-containinglayer 32. The multiple first stacked bodies SB1 are provided on aportion of the metal-containing film 31FM. The multiple second stackedbodies SB2 are provided on another portion of the metal-containing film31FM. The third stacked body SB3 is provided on the metal-containingfilm 31FM. A mask MS1 is provided on the multiple first stacked bodiesSB1 and the multiple second stacked bodies SB2. The third stacked bodySB3 is not covered with the mask MS1. The metal-containing film 31FMincludes a portion positioned between the third stacked body SB3 and themultiple first stacked bodies SB1 in a direction along the X-Y plane.This portion is not covered with the mask MS1. The metal-containing film31FM includes a portion positioned between the third stacked body SB3and the multiple second stacked bodies SB2 in a direction along the X-Yplane. This portion is not covered with the mask MS1.

As shown in FIG. 19B, processing of the patterning body including themetal-containing film 31FM, the multiple first stacked bodies SB1, themultiple second stacked bodies SB2, and the third stacked body SB3 isperformed. The processing includes at least one of etching, oxidationtreatment, or ion beam irradiation. For example, in the etching, theportion of the metal-containing film 31FM not covered with the mask MS1is removed. For example, in the oxidation treatment, the portion of themetal-containing film 31FM not covered with the mask MS1 is oxidized.The oxidized portion is used to form the insulating portions. Forexample, in the ion beam irradiation, the portion of themetal-containing film 31FM not covered with the mask MS1 is removed. Forexample, in the ion beam irradiation, a compound may be produced fromthe portion of the metal-containing film 31FM not covered with the maskMS1. The compound includes, for example, at least one of an oxide of themetal included in the metal-containing film 31FM, a nitride of themetal, or an oxynitride of the metal.

For example, in the case where at least one of oxidation treatment orion beam irradiation is implemented, a compound is formed from themetal-containing film 31FM. The compound is used to form the firstinsulating region 35 a and the second insulating region 35 b.

The magnetic memory device 151 is formed by such processing. At least aportion of the stacked body SB3 may be changed before and after theprocessing recited above. In the case where the sixth magnetic layer 16exists before the processing recited above, the sixth magnetic layer 16may be changed by the processing recited above. The sixth magnetic layer16 may be removed.

FIG. 20 is a schematic view illustrating another magnetic memory deviceaccording to the fifth embodiment.

As shown in FIG. 20, the magnetic memory device 152 according to theembodiment also includes the first metal-containing layer 31, the secondmetal-containing layer 32, the multiple first stacked bodies SB1, themultiple second stacked bodies SB2, the third stacked body SB3, and thecontroller 70. The insulating portion 40 is provided in the magneticmemory device 152. The insulating portion 40 is provided around themultiple first stacked bodies SB1, the multiple second stacked bodiesSB2, and the third stacked body SB3. The insulating portion 40 is, forexample, an inter-layer insulating film.

A first insulating region 40 a and a second insulating region 40 b areprovided in the magnetic memory device 152. The first insulating region40 a and the second insulating region 40 b include, for example, thesame material as a material included in the insulating portion 40.

For example, in the processing described in reference to FIG. 19B, forexample, etching is performed; and a portion of the metal-containingfilm 31FM is removed. A recess is formed in the removed portion. Therecess is filled with a material used to form the insulating portion 40.Thereby, the first insulating region 40 a and the second insulatingregion 40 b are formed.

In the magnetic memory device 152 as well, for example, stable memoryoperations are possible. For example, the yield can be improved. Forexample, stable operations are obtained easily even when the size ofeach of the multiple stacked bodies SB0 is small. The bit density can beincreased.

According to the embodiments, a magnetic memory device and a method formanufacturing the magnetic memory device can be provided in which thebit density can be increased.

In this specification, the “state of being electrically connected”includes the state in which multiple conductive bodies are physically incontact, and a current flows between these multiple conductive bodies.The “state of being electrically connected” includes the state in whichanother conductive body is inserted between the multiple conductivebodies, and a current flows between these multiple conductive bodies.The “state of being electrically connected” includes the state in whichan electrical element (a switch element such as a transistor or thelike) is inserted between multiple conductive bodies so that a state inwhich a current flows between these multiple conductive bodies isformable.

In the specification of the application, “perpendicular” and “parallel”refer to not only strictly perpendicular and strictly parallel but alsoinclude, for example, the fluctuation due to manufacturing processes,etc. It is sufficient to be substantially perpendicular andsubstantially parallel.

Hereinabove, exemplary embodiments of the invention are described withreference to specific examples. However, the embodiments of theinvention are not limited to these specific examples. For example, oneskilled in the art may similarly practice the invention by appropriatelyselecting specific configurations of components included in magneticmemory devices such as metal-containing layers, magnetic layers,intermediate layers, controllers, etc., from known art. Such practice isincluded in the scope of the invention to the extent that similareffects thereto are obtained.

Further, any two or more components of the specific examples may becombined within the extent of technical feasibility and are included inthe scope of the invention to the extent that the purport of theinvention is included.

Moreover, all magnetic memory devices and methods for manufacturing thesame practicable by an appropriate design modification by one skilled inthe art based on the magnetic memory devices and the methods formanufacturing the same described above as embodiments of the inventionalso are within the scope of the invention to the extent that the spiritof the invention is included.

Various other variations and modifications can be conceived by thoseskilled in the art within the spirit of the invention, and it isunderstood that such variations and modifications are also encompassedwithin the scope of the invention.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the invention.

What is claimed is:
 1. A magnetic memory device, comprising: ametal-containing layer including a first portion, a second portion, athird portion located between the first portion and the second portion,a fourth portion located between the third portion and the secondportion, and a fifth portion located between the third portion and thefourth portion, each of the first, second, third, fourth, and fifthportions extending through an entirety of the metal-containing layer ina third direction; a first magnetic layer separated from the thirdportion in a first direction crossing a second direction, the seconddirection being from the first portion toward the second portion; asecond magnetic layer provided between the first magnetic layer and aportion of the third portion; a first intermediate layer including aportion provided between the first magnetic layer and the secondmagnetic layer, the first intermediate layer being nonmagnetic; a thirdmagnetic layer separated from the fourth portion in the first direction;a fourth magnetic layer provided between the third magnetic layer and aportion of the fourth portion; a second intermediate layer including aportion provided between the third magnetic layer and the fourthmagnetic layer, the second intermediate layer being nonmagnetic; and acontroller electrically connected with the first portion and the secondportion, a length along the third direction of the third portion beinglonger than a length along the third direction of the second magneticlayer, the third direction crossing a plane including the firstdirection and the second direction, the length along the third directionof the third portion being longer than a length along the thirddirection of the fifth portion, the controller being configured toimplement: a first program operation of supplying a first programcurrent from the first portion toward the second portion; and a secondprogram operation of supplying a second program current from the secondportion toward the first portion, a first electrical resistance betweenthe first magnetic layer and the first portion after the first programoperation being different from a second electrical resistance betweenthe first magnetic layer and the first portion after the second programoperation.
 2. The device according to claim 1, wherein a length alongthe third direction of the fourth portion is longer than a length alongthe third direction of the fourth magnetic layer, and the length of thefourth portion is longer than the length of the fifth portion.
 3. Thedevice according to claim 1, wherein the third portion includes: a firstoverlap region overlapping the second magnetic layer in the firstdirection; and a first non-overlap region not overlapping the secondmagnetic layer in the first direction, and a thickness along the firstdirection of at least a portion of the first non-overlap region isthinner than a first overlap region thickness along the first directionof the first overlap region.
 4. The device according to claim 3, whereinthe third portion further includes a second non-overlap region, thesecond non-overlap region does not overlap the second magnetic layer inthe first direction, the first overlap region is positioned between thefirst non-overlap region and the second non-overlap region in the thirddirection, and the thickness along the first direction of at least aportion of the second non-overlap region is thinner than the firstoverlap region thickness.
 5. The device according to claim 4, wherein afirst ratio of a total of a length along the third direction of thefirst non-overlap region and a length along the third direction of thesecond non-overlap region to the first overlap region thickness ishigher than a ratio of an absolute value of a difference between alength along the second direction of a surface of the second magneticlayer opposing the metal-containing layer and a length along the seconddirection of a surface of the second magnetic layer opposing the firstintermediate layer to a thickness along the first direction of thesecond magnetic layer.
 6. The device according to claim 1, wherein thethird portion includes a first overlap region overlapping the secondmagnetic layer in the first direction, and a thickness along the firstdirection of the fifth portion is thinner than a first overlap regionthickness along the first direction of the first overlap region.
 7. Thedevice according to claim 1, wherein the controller is furtherelectrically connected with the first magnetic layer and the thirdmagnetic layer, and the controller in the first program operation setsthe first magnetic layer to a potential different from a potential ofthe third magnetic layer.
 8. The device according to claim 1, furthercomprising a compound region, the compound region including a metalincluded in the second magnetic layer, the compound region beingprovided along a direction connecting the second magnetic layer and thefourth magnetic layer between the second magnetic layer and the fourthmagnetic layer.
 9. The device according to claim 1, wherein a crystalstructure of the third portion is different from a crystal structure ofat least a portion of the fifth portion.
 10. A magnetic memory device,comprising: a metal-containing layer including a first portion, a secondportion, and a third portion located between the first portion and thesecond portion, each of the first, second, and third portions extendingthrough an entirety of the metal-containing layer in a third direction;a first magnetic layer separated from the third portion in a firstdirection crossing a second direction, the second direction being fromthe first portion toward the second portion; a second magnetic layerprovided between the first magnetic layer and a portion of the thirdportion; a first intermediate layer including a portion provided betweenthe first magnetic layer and the second magnetic layer, the firstintermediate layer being nonmagnetic; and a controller electricallyconnected with the first portion and the second portion, a length alongthe third direction of the third portion being longer than a lengthalong the third direction of the second magnetic layer, the thirddirection crossing a plane including the first direction and the seconddirection, the length along the third direction of the third portionbeing longer than a length along the third direction of a portionbetween the third portion and the second portion, the controller beingconfigured to implement: a first program operation of supplying a firstprogram current from the first portion toward the second portion; and asecond program operation of supplying a second program current from thesecond portion toward the first portion, a first electrical resistancebetween the first magnetic layer and one of the first portion or thesecond portion after the first program operation being different from asecond electrical resistance between the first magnetic layer and theone of the first portion or the second portion after the second programoperation.
 11. A magnetic memory device, comprising: a metal-containinglayer including a first portion, a second portion, and a third portionlocated between the first portion and the second portion; a firstmagnetic layer separated from the third portion in a first directioncrossing a second direction, the second direction being from the firstportion toward the second portion; a second magnetic layer providedbetween the first magnetic layer and a portion of the third portion; afirst intermediate layer including a portion provided between the firstmagnetic layer and the second magnetic layer, the first intermediatelayer being nonmagnetic; and a controller electrically connected withthe first portion and the second portion, the third portion including: afirst overlap region overlapping the second magnetic layer in the firstdirection; and a first non-overlap region not overlapping the secondmagnetic layer in the first direction, a thickness along the firstdirection of at least a portion of the first non-overlap region beingthinner than a first overlap region thickness along the first directionof the first overlap region, the controller being configured toimplement: a first program operation of supplying a first programcurrent from the first portion toward the second portion; and a secondprogram operation of supplying a second program current from the secondportion toward the first portion, a first electrical resistance betweenthe first magnetic layer and the first portion after the first programoperation being different from a second electrical resistance betweenthe first magnetic layer and the first portion after the second programoperation.
 12. The device according to claim 11, wherein the thirdportion further includes a second non-overlap region, the secondnon-overlap region does not overlap the second magnetic layer in thefirst direction, the first overlap region is positioned between thefirst non-overlap region and the second non-overlap region in a thirddirection crossing a plane including the first direction and the seconddirection, and a thickness along the first direction of at least aportion of the second non-overlap region is thinner than the firstoverlap region thickness.
 13. The device according to claim 12, whereina first ratio of a total of a length along the third direction of thefirst non-overlap region and a length along the third direction of thesecond non-overlap region to the first overlap region thickness ishigher than a ratio of an absolute value of a difference between alength along the second direction of a surface of the second magneticlayer opposing the metal-containing layer and a length along the seconddirection of a surface of the second magnetic layer opposing the firstintermediate layer to a thickness along the first direction of thesecond magnetic layer.
 14. The device according to claim 13, wherein thefirst ratio is higher than a ratio of an absolute value of a differencebetween a length along the third direction of the surface of the secondmagnetic layer opposing the metal-containing layer and a length alongthe third direction of the surface of the second magnetic layer opposingthe first intermediate layer to the thickness along the first directionof the second magnetic layer.
 15. The device according to claim 11,further comprising: a third magnetic layer; a fourth magnetic layer; anda second inter mediate layer, the second intermediate layer beingnonmagnetic, the metal-containing layer further including a fourthportion located between the third portion and the second portion, and afifth portion located between the third portion and the fourth portion,the third magnetic layer being separated from the fourth portion in thefirst direction, the fourth magnetic layer being provided between thethird magnetic layer and a portion of the fourth portion, the secondintermediate layer including a portion provided between the thirdmagnetic layer and the fourth magnetic layer, a thickness along thefirst direction of the fifth portion being thinner than the firstoverlap region thickness.
 16. A magnetic memory device, comprising: afirst metal-containing layer including a first portion, a secondportion, and a first intervening portion provided between the firstportion and the second portion; a second metal-containing layerincluding a third portion, a fourth portion, and a second interveningportion provided between the third portion and the fourth portion, thesecond portion being provided between the first portion and the fourthportion, the third portion being provided between the second portion andthe fourth portion; and a plurality of first stacked bodies, the firststacked bodies being arranged along the first metal-containing layer,one of the first stacked bodies including a first magnetic layer, asecond magnetic layer, and a first intermediate layer, the firstmagnetic layer being separated from the first intervening portion in afirst direction crossing a second direction, the second direction beingfrom the first portion toward the second portion, the second magneticlayer being provided between the first intervening portion and the firstmagnetic layer, the first intermediate layer being nonmagnetic andincluding a portion provided between the first magnetic layer and thesecond magnetic layer; a plurality of second stacked bodies, the secondstacked bodies being arranged along the second metal-containing layer,one of the second stacked bodies including a third magnetic layer, afourth magnetic layer, and a second intermediate layer, the thirdmagnetic layer being separated from the second intervening portion inthe first direction, the fourth magnetic layer being provided betweenthe second intervening portion and the third magnetic layer, the secondintermediate layer being nonmagnetic and including a portion providedbetween the third magnetic layer and the fourth magnetic layer; a thirdstacked body including a fifth magnetic layer and being provided betweenthe first stacked bodies and the second stacked bodies; and a controllerelectrically connected with the first to fourth portions, the firststacked bodies, and the second stacked bodies, the controller beingconfigured to implement: a first program operation of supplying a firstprogram current from the first portion toward the second portion; and asecond program operation of supplying a second program current from thesecond portion toward the first portion, a first electrical resistancebetween the first magnetic layer and one of the first portion or thesecond portion after the first program operation being different from asecond electrical resistance between the first magnetic layer and theone of the first portion or the second portion after the second programoperation, the controller being configured to implement: a third programoperation of supplying a third program current from the third portiontoward the fourth portion; and a fourth program operation of supplying afourth program current from the fourth portion toward the third portion,a third electrical resistance between the third magnetic layer and oneof the third portion or the fourth portion after the third programoperation being different from a fourth electrical resistance betweenthe third magnetic layer and the one of the third portion or the fourthportion after the second program operation.
 17. The device according toclaim 16, further comprising: a third metal-containing layer providedbetween the second portion and the third portion; a first insulatingregion provided between the second portion and the thirdmetal-containing layer; and a second insulating region provided betweenthe third portion and the third metal-containing layer.
 18. The deviceaccording to claim 16, wherein the controller is further electricallyconnected with the first magnetic layer of each of the first stackedbodies, and the controller in the first program operation sets apotential of the first magnetic layer included in the one of the firststacked bodies to a potential different from a potential of the firstmagnetic layer included in one other of the first stacked bodies.
 19. Amagnetic memory device, comprising: a metal-containing layer including afirst portion, a second portion, a third portion located between thefirst portion and the second portion, a fourth portion located betweenthe third portion and the second portion, and a fifth portion locatedbetween the third portion and the fourth portion; a first magnetic layerseparated from the third portion in a first direction crossing a seconddirection, the second direction being from the first portion toward thesecond portion; a second magnetic layer provided between the firstmagnetic layer and a portion of the third portion; a first intermediatelayer including a portion provided between the first magnetic layer andthe second magnetic layer, the first intermediate layer beingnonmagnetic; a third magnetic layer separated from the fourth portion inthe first direction; a fourth magnetic layer provided between the thirdmagnetic layer and a portion of the fourth portion; a secondintermediate layer including a portion provided between the thirdmagnetic layer and the fourth magnetic layer, the second intermediatelayer being nonmagnetic; and a controller electrically connected withthe first portion and the second portion, a length along a thirddirection of the third portion being longer than a length along thethird direction of the second magnetic layer, the third directioncrossing a plane including the first direction and the second direction,the length along the third direction of the third portion being longerthan a length along the third direction of the fifth portion, thecontroller being configured to implement: a first program operation ofsupplying a first program current from the first portion toward thesecond portion; and a second program operation of supplying a secondprogram current from the second portion toward the first portion, afirst electrical resistance between the first magnetic layer and thefirst portion after the first program operation being different from asecond electrical resistance between the first magnetic layer and thefirst portion after the second program operation, wherein the thirdportion includes a first overlap region overlapping the second magneticlayer in the first direction, and a thickness along the first directionof the fifth portion is thinner than a first overlap region thicknessalong the first direction of the first overlap region.
 20. The deviceaccording to claim 19, wherein the third portion further includes asecond non-overlap region, the second non-overlap region does notoverlap the second magnetic layer in the first direction, the firstoverlap region is positioned between the first non-overlap region andthe second non-overlap region in the third direction, and the thicknessalong the first direction of at least a portion of the secondnon-overlap region is thinner than the first overlap region thickness.21. The device according to claim 20, wherein a first ratio of a totalof a length along the third direction of the first non-overlap regionand a length along the third direction of the second non-overlap regionto the first overlap region thickness is higher than a ratio of anabsolute value of a difference between a length along the seconddirection of a surface of the second magnetic layer opposing themetal-containing layer and a length along the second direction of asurface of the second magnetic layer opposing the first intermediatelayer to a thickness along the first direction of the second magneticlayer.